基于NS-DSMC耦合方法与Langmuir探针诊断的射频等离子体氧化过程中等离子体分布  

Plasma Distribution in RF Plasma Oxidation Process Based on NS-DSMC Hybrid Method and Langmuir Probe Diagnostic

作　　者：刘万锁 王志宝 王庆[1] 蔺增[1] Liu Wansuo;Wang Zhibao;Wang Qing;Lin Zeng(School of Mechanical Engineering and Automation,Northeastern University,Shenyang 110819,China;NeuMat(Taian)Surface Technology Co.,Ltd,Taian 250111,China;Taian Industrial Technology Research Institute of Vacuum Surface Engineering,Taian 250111,China)

机构地区：[1]东北大学机械工程及自动化学院,辽宁沈阳110819 [2]NeuMat(泰安)表面技术有限公司,山东泰安250111 [3]泰安真空表面工程工业技术研究院,山东泰安250111

出　　处：《稀有金属材料与工程》2024年第4期988-993,共6页Rare Metal Materials and Engineering

基　　金：National Natural Science Foundation of China(51775096);Chinese Academy of Sciences WEGO Research Development Plan([2007]006);Fundamental Research Funds for the Central Universities,China(N2003009)。

摘　　要：采用Navier-Stokes方程和直接模拟蒙特卡罗方法相结合的方式模拟了反应腔内的气体流动,并结合Langmuir探针检测设备分析了气体流速与等离子体密度的关系。结果表明,流体均匀性对等离子体的均匀性有显著影响。在6.5 Pa的压力下,等离子体密度和流速呈正相关,与在大气压下的实验结果一致,说明提高流体均匀性可以提高等离子体的氧化均匀性。The combined method of Navier-Stokes equation and direction simulation Monte-Carlo method was used to simulate the flow in the reaction chamber,and the relationship between gas flow velocity and plasma density was analyzed by the Langmuir probe detection equipment.Results show that the flow uniformity can significantly impact the plasma uniformity.Under the pressure of 6.5 Pa,the plasma density and flow velocity show a positive correlation,which is consistent with the experiment results in atmosphere pressure.This research verifies that improving the flow uniformity can enhance the plasma oxidation uniformity.

关 键 词：等离子体氧化 等离子体诊断 NS-DSMC方法 LANGMUIR探针 等离子体均匀性 

分 类 号：TB43[一般工业技术]