氧化剂含量对304不锈钢化学机械抛光的影响  

Effect of Oxidant Content on 304 Stainless Steel Chemical Mechanical Polishing

作　　者：季明捷 陈国美 倪自丰 张鑫 郑世坤 JI Mingjie;CHEN Guomei;NI Zifeng;ZHANG Xin;ZHENG Shikun(School of Mechanical Engineering,Jiangnan University,Wuxi Jiangsu 214122,China;School of Mechanical and Electrical Engineering,Wuxi Vocational Institute of Commerce,Wuxi Jiangsu 214153,China;Jiangsu Province Engineering Research Center of Micro-Nano Additive and Subtractive Manufacturing,Wuxi Jiangsu 214122,China)

机构地区：[1]江南大学机械工程学院,江苏无锡214122 [2]无锡商业职业技术学院机电技术学院,江苏无锡214153 [3]江苏省微纳增减材制造工程研究中心,江苏无锡214122

出　　处：《润滑与密封》2024年第5期152-158,共7页Lubrication Engineering

基　　金：国家自然科学基金项目(52205196);江苏省高等学校自然科学研究面上项目(19KJB460023)。

摘　　要：为了探究氧化剂含量对304不锈钢化学机械抛光的影响及其作用机制,采用过氧化氢作为氧化剂,研究不同氧化剂质量分数下304不锈钢材料去除率及表面粗糙度值的变化规律,并基于接触角和电化学试验分析过氧化氢在抛光过程中的作用机制。结果表明:化学机械抛光过程中过氧化氢含量的增加有利于304不锈钢表面氧化膜的生成,从而有效提高304不锈钢的材料去除率及表面质量;但是过高的过氧化氢含量会导致304不锈钢表面氧化膜致密,使得化学作用与机械作用失衡从而造成304不锈钢表面质量下降;当过氧化氢质量分数为0.04%时,抛光后304不锈钢表面粗糙度值最低,仅有2.5 nm,材料去除率达到324.21 nm/min。In order to investigate the effect and mechanism of oxidant content on 304 stainless steel chemical mechanical polishing,hydrogen peroxide was used as oxidant to study the changes in material removal rate and surface roughness values of 304 stainless steel at different content of oxidant.The mechanism of hydrogen peroxide in the polishing process was analyzed based on contact angle and electrochemical experiments.The results show that the increase of hydrogen peroxide content in the chemical mechanical polishing process is beneficial to the generation of oxide film on the surface of 304 stainless steel,thus effectively improving the material removal rate and surface quality of 304 stainless steel.But too high content of hydrogen peroxide will lead to a dense oxide film on the surface of 304 stainless steel,causing an imbalance between chemical and mechanical effects and resulting in a decrease in the surface quality of 304 stainless steel.When the mass fraction of hydrogen peroxide is 0.04%,the surface roughness value of polished 304 stainless steel is the lowest,only 2.5 nm,and the material removal rate reaches 324.21 nm/min.

关 键 词：304不锈钢 化学机械抛光 氧化剂 电化学 

分 类 号：TH117[机械工程—机械设计及理论]