PWM频率对超精密机床主轴动态性能影响研究  

Research on the Influence of PWM Frequency on the Dynamic Performance of Ultra Precision Machine Tool Spindles

作　　者：武海亮 杨辉[1] 卢超伟 张杨 WU Hailiang;YANG Hui;LU Chaowei;ZHANG Yang(Aviation Key Laboratory of Science and Technology on Precision Manufacturing Technology,Beijing Precision Engineering Institute for Aircraft Industry,Beijing 100076,China)

机构地区：[1]北京航空精密机械研究所精密制造技术航空科技重点实验室,北京100076

出　　处：《组合机床与自动化加工技术》2024年第5期141-146,151,共7页Modular Machine Tool & Automatic Manufacturing Technique

基　　金：航空基金项目(20200003043001)。

摘　　要：为了分析多轴联动超精密机床伺服驱动器的PWM频率对超精密机床动态性能的影响,研究基于一款国产超精密机床的气体静压主轴,对其控制系统进行Simulink建模、仿真,并开展位置控制实验。通过主轴电机的动态特性方程对PWM型驱动器控制下的超精密机床主轴动态响应进行建模,模拟不同PWM频率下的主轴电机的电流、转矩和转速的响应波形,分析仿真数据,得到被控对象和PWM频率之间的控制律。在此基础上,以主轴的重复定位精度作为动态性能参数,搭建超精密机床主轴动态性能测试平台,通过对重复定位精度实验数据与仿真结果进行线性相关度分析,定量评价其相关度。最终得到气体静压主轴在PWM频率为20~60 kHz的范围内动态性能显著增强,而在60~100 kHz频率范围内的增强的趋势变缓,主轴动态性能的最优PWM频率参数为60 kHz。在设计选型阶段为超精密机床控制系统的参数选择提供了参考。In order to analyze the influence of the PWM frequency of the multi-axis linkage ultra-precision machine tool servo drive on the dynamic performance of the ultra-precision machine tool,This research is based on the aerostatic spindle of a domestic ultra-precision machine tool to carry out Simulink modeling and simulation of its control system,and carry out position control experiments.Through the dynamic characteristic equation of the spindle motor,the dynamic response of the ultra-precision machine tool spindle under the PWM controller is modeled,and the response waveforms of the current,torque and speed of the spindle motor under different PWM frequencies are simulated.By analyzing the simulation data,the control law between the plant and the PWM frequency is obtained.On this basis,the repetitive positioning accuracy of the spindle is used as the dynamic performance parameter to build an ultra-precision machine tool spindle dynamic performance test platform,and the correlation degree is quantitatively evaluated by analyzing the linear correlation between the experimental data and the simulation results of the repetitive positioning accuracy.Finally,it is obtained that the dynamic performance of the aerostatic spindle is significantly enhanced in the PWM frequency range of 20 to 60 kHz,while the enhancement trend in the frequency range of 60 to 100 kHz is slowed down,and the optimal PWM frequency parameter of the spindle dynamic performance is 60 kHz.It provides a reference for the parameter selection of the ultra-precision machine tool control system in the design and selection stage.

关 键 词：超精密机床 PWM频率 气体静压主轴 重复定位精度 

分 类 号：TH161[机械工程—机械制造及自动化] TG659[金属学及工艺—金属切削加工及机床]