基于ANSYS的物理气相沉积真空装置力学分析  

Mechanical Analysis of Physical Vapor Deposition Vacuum Device Based on ANSYS Software

作　　者：宋涛[1] 张柏诚 许忠政 王春雷 张黎源[1] SONG Tao;ZHANG Baicheng;XU Zhongzheng;WANG Chunlei;ZHANG Liyuan(Institute of Laser Technology,Institute of Physical and Chemical Engineering of Nuclear Industry,Tianjin 300181,China)

机构地区：[1]核工业理化工程研究院激光技术研究所,天津300181

出　　处：《机械工程师》2024年第6期146-148,152,共4页Mechanical Engineer

摘　　要：PVD用真空装置是实现真空镀膜试验的重要设备,必须保证真空装置在实际工况和载荷的作用下十分安全可靠,不发生破损事故。文中采用ANSYS软件对真空装置建模、划分网格、确定边界,并施加实际载荷、地震载荷,计算在设计工况、正常工况、异常工况及事故工况下的应力值。采用计算值对原有的设计进行了修正,将壁厚从原始设计14 mm改为10 mm,节省了9%的不锈钢材料。修改后的设计方案仍可满足RCC-M规范要求。The vacuum device for PVD is an important equipment for vacuum coating test.It must be ensured that the equipment is very safe and reliable without damage under the actual working conditions and loads.This paper uses ANSYS software to build the vacuum device model,divide the grid,determine the boundary,apply the actual load and seismic load,and calculate the stress value under design condition,normal condition,abnormal condition and accident condition.The calculated value is used to modify the original design,and the wall thickness is changed from 14 mm to 10 mm,saving 9%of stainless steel material.The modified design scheme can meet the requirements of RCC-M specification.

关 键 词：真空装置 力学分析 ANSYS仿真 物理气相沉积 

分 类 号：TP391.9[自动化与计算机技术—计算机应用技术]