凹面光栅衍射效率测试双单色仪的光学系统设计和分析  

The Optical System Design on the Instrument for Concave Grating Diffraction Efficiency

作　　者：寇婕婷 汪浩鹏 易拥洁 吴鹏程 Kou Jieting;Wang Haopeng;Yi Yongjie;Wu Pengcheng(United Microelectronics Center,Chongqing,China)

机构地区：[1]联合微电子中心有限责任公司,重庆

出　　处：《科学技术创新》2024年第12期74-77,共4页Scientific and Technological Innovation

摘　　要：为了完善凹面光栅衍射效率测试仪的研制,需要对凹面光栅衍射效率测试仪的光学(成像)系统进行设计和分析。根据仪器光学系统的设计要求,分别对Ⅲ型凹面光栅和Ⅳ型凹面光栅组成的光学系统进行设计和模拟,给出了各自光学系统的像面点列图和实际光线追迹数据。设计结果表明,仪器光学系统的出射光斑最大宽度为0.72 mm,最大高度为7.54 mm;通过适当选择探测器的规格和尺寸,可以确保出射光通量没有损失。进而保证了仪器光学系统的测量准确性。In order to finish the research of the instrument for testing diffraction efficiency of concave grating,the optical system design and simulation of the concave grating is need to be done on the instrument.According to the design requirement,the design and simulation on the optical system of the type Ⅲ concave grating and the typeⅣconcave grating has been done respectively,the spot diagram of the image surface and the results of real ray trace was given.As a result,the maximum width of the exit spot is 0.72 mm and the maximum height of the exit spot is 7.54 mm in the optical system of the instrument,though selected the size and the specification of the detector properly,the exit luminous flux would not be lost.Which guarantee the testing precision of the optical system of the instrument.

关 键 词：凹面光栅 衍射效率 光学设计 结果分析 

分 类 号：O436.1[机械工程—光学工程]