高洁净度超光滑非球面的自动化干涉检测方法  

Automated interferometry test of high-cleanliness ultra-smooth aspherical surfaces

作　　者：李凌[1] 张家福 陶鑫 于宗伟 李梦旭 王任远 陈西 崔程光 王向东[1] Li Ling;Zhang Jiafu;Tao Xin;Yu Zongwei;Li Mengxu;Wang Renyuan;Chen Xi;Cui Chengguang;Wang Xiangdong(Beijing Institute of Space Mechanics&Electricity,Beijing 100094,China)

机构地区：[1]北京空间机电研究所,北京100094

出　　处：《红外与激光工程》2024年第5期95-104,共10页Infrared and Laser Engineering

摘　　要：为了实现应用于高能激光等领域对表面洁净度有着极高要求的超光滑非球面检测,排除检测人员带来的洁净度与空气扰动的影响,研究了高洁净度超光滑非球面的自动化干涉检测方法。通过建立补偿干涉法非球面失调量与波前像差之间的灵敏度矩阵,实现利用波前像差求解被测非球面失调量。以理想干涉系统的离焦、彗差与像散为优化目标,进行反馈控制,实现被测非球面的自动化调整,进而实现高洁净度超光滑非球面的自动化干涉检测。实验结果表明,在干涉图可测范围内,利用灵敏度矩阵通过几步迭代即可实现非球面失调量的收敛。结合Stewart六自由度调整台,分别实现2μm精度的平移误差调整、2"精度的光轴自动化对准,最终完成被测非球面的精密调整,实现高洁净度超光滑非球面的自动化干涉检测。采用灵敏度矩阵与六自由度调整的非球面自动化干涉检测方法可实现被测非球面失调量的快速求解与自动调整,降低人员和环境带来的扰动影响,提高了非球面的检测速度,并实现了高洁净度超光滑非球面的自动化干涉检测。Objective Aspherical surfaces are widely used in modern optical systems.With the rapid development of various optical instruments,especially laser ignition devices,laser weapons,and satellite products,which have high standards for cleanliness,smoothness,and other quality aspects,the trend in customized development is quickly shifting towards modularization and batch production.As key components of the optical system,the automation of manufacturing,inspection,and assembly of aspherical surfaces directly determines the quality and efficiency of mass production.The automated optical inspection of aspherical surfaces has also raised increasingly higher requirements.Interferometry,especially compensation methods,is a rapid,precise,and non-contact technique with the potential for automated test of aspheric surfaces.In order to meet the stringent requirements for surface cleanliness of ultra-smooth aspherical surfaces used in high-energy lasers and other fields,and to eliminate the impact of cleanliness and thermal disturbances introduced by inspectors,researchers have developed an automated interferometric detection method for ultra-smooth aspherical surfaces with high cleanliness.Methods The mathematical relationship between the amount of misalignment and wavefront aberration is determined by the compensation method based on the theory of vector wavefront aberration.Spherical and defocus aberrations are only affected by the position of the compensator or aspheric surface under test along the optical axis direction.Tilt,coma,astigmatism,field curvature,and distortion aberrations are influenced by the tilt and eccentricity of the optical elements.The order of the effects of tilt and eccentricity on aberrations varies.Based on the analysis,the automated interferometry test method is proposed.By establishing the sensitivity matrix between the misalignment amount of the aspheric surface and the wavefront aberration of the compensated interferometric method,it is possible to utilize the wavefront aberration to calculate the

关 键 词：干涉检测 补偿法 灵敏度矩阵 非球面 STEWART平台 六自由度调整 

分 类 号：TH744[机械工程—光学工程]