浅谈光刻机线缆及管道刚度设计  

A Brief Discussion on Stiffness Design of Lithographic Machine Cable and Pipeline

作　　者：刘磊 LIU Lei(Shanghai Micro Electronics Equipment(GROUP)Co.,Ltd.,Shanghai 201203,China)

机构地区：[1]上海微电子装备(集团)股份有限公司,上海201203

出　　处：《电子工业专用设备》2024年第3期24-32,共9页Equipment for Electronic Products Manufacturing

摘　　要：光刻机中遍布电线电缆及环境管道等,这些线缆和管道会产生附加刚度,影响内外部结构的振动隔离和减振器性能;它们也会传递动态力,将外界振动传入相对静止的内部框架,影响套刻精度。如何减小内部外部结构连接线束的刚度比较难评估,对典型线束分别采用压杆失稳问题分析方法得到了布管布线的作用反力和刚度分别受布管布线挠度、高度及角度影响的变化规律。通过搭建线缆及管道刚度测试平台的方法对典型的管线传输方式进行测试,得到了禁止使用直线传输、传输高度尽量大、传输形式尽量采用180°弯曲形式等可减小线缆刚度的结论。从而对布线布管工规范作业提供指导建议,将布线布管对整机性能影响降至较低水平。The lithography machine is covered with wires and cables and environmental pipes,etc.These cables and pipes will produce additional stiffness,affecting the vibration isolation and shock absorber performance in the internal and external world.They also transmit dynamic forces,transferring external vibrations into the relatively static internal frame,affecting the engraving accuracy.It is difficult to evaluate how to reduce the stiffness of wiring harnesses connected with internal and external structures.The pressure rod instability problem analysis method is used to analyze the typical wiring harnesses,and the changes of the reaction force and stiffness of wiring are respectively affected by the deflection,height and Angle of wiring.By setting up a test platform for the stiffness of cables and pipelines,the typical transmission methods of pipelines are tested.It is concluded that the linear transmission is prohibited,the transmission height is as large as possible,and the transmission form is as large as possible in the form of 180°bending.Therefore,it provides guidance and suggestions for the standard operation of wiring and piping,and reduces the influence of wiring and piping on the performance of the whole machine to a low level.

关 键 词：光刻机 线束刚度 压杆失稳 测试平台 振动 动态性能 

分 类 号：TN305[电子电信—物理电子学]