运动台结构刚度及接触形式动态性能优化  

Dynamic Performance Optimization of Structure and Contact form of Stage

作　　者：杨师[1] 王月鹏 李龙飞 赵宏宇 陈沿宇 YANG Shi;WANG Yuepeng;LI Longfei;ZHAO Yongjin;CHEN Yanyu(The 45th Research Institute of CETC,Beijing 100176,China)

机构地区：[1]中国电子科技集团公司第四十五研究所,北京100176

出　　处：《电子工业专用设备》2024年第3期64-67,共4页Equipment for Electronic Products Manufacturing

摘　　要：介绍了运动台结构刚度优化的目的与思路,根据仿真结果对几种结构优化形式的预期效果进行判断,并结合整机需求完成定型及设计结果测试,通过实践闭环了仿真模型;根据运动台断开与连接整机重复性需求,设计改型了运动台与整机接触形式,并通过机械加速度传递函数测试进行了验证,保证了幅值裕度与相位裕度在较小范围内时,同样实现稳定控制。Based on the simulation results,the expected results of several structural optimization forms are judged,and the requirements of the whole machine are combined to complete the shaping and test of design results,according to the repeatability demand of the whole machine,the contact form between the whole machine and the sports table is designed and modified,and is verified by the mechanical transfer function test,when the amplitude margin and the phase margin are in a small range,the stable control is also realized.

关 键 词：精密设备 刚度 振动控制 

分 类 号：TN305[电子电信—物理电子学]