扫描电子显微镜样品制备原理及方法  

Principles and Methods of Sample Preparation for Scanning Electron Microscopy

作　　者：蒋蓉蓉 姚懿容 李明 管建敏 卢焕明 JIANG Rongrong;YAO Yirong;LI Ming;GUAN Jianmin;LU Huanming(Test Center,Ningbo Institute of Materials Technology and Engineering,Chinese Academy of Sciences,Ningbo 315201,Zhejiang China)

机构地区：[1]中国科学院宁波材料技术与工程研究所测试中心,浙江宁波315201

出　　处：《分析测试技术与仪器》2024年第3期153-160,共8页Analysis and Testing Technology and Instruments

摘　　要：合理正确的样品制备是高质量扫描电子显微镜(SEM)表征的重要前提.将样品固定在样品座上是一个简短但却重要的步骤,但其重要性却往往被低估.不合理的制样会造成表征中荷电效应、图像漂移、面分布重影、颗粒团聚等各种问题,不仅影响表征效果,增加测试难度,而且有可能错失重要信息.从导电胶的选择、样品座的选择、样品固定方式、电子迁移通道的搭建以及镀膜等方面,综合总结了样品制备的操作要点,并阐述了其机理和原因,希望帮助SEM使用者通过优化制样过程提高SEM的表征效果.Reasonable and correct sample preparation is a critical prerequisite for high-quality scanning electron microscopy(SEM)characterization.The process of fixing the sample to the sample holder is a brief but essential step that is often underestimated.Improper sample preparation can lead to a variety of problems during characterization,such as charging effect,image drift,surface distribution ghosting and particle aggregation,which not only affect the characterization effect and increase the difficulty of testing,but also may miss important informations.The key points of sample preparation were summarized,including the selection of conductive adhesive and sample holder,methods of sample fixation,establishment of electron migration channel,and coating techniques,and the principles and reasons were expounded,hoping to help the users of SEM improve the characterization effect by optimizing sample preparation techniques.

关 键 词：样品制备 导电胶 样品座 电子迁移通道 镀膜 

分 类 号：O656.4[理学—分析化学] TN209[理学—化学]