电流体喷印脉冲电压参数配置对沉积液滴体积的影响  

Effects of Pulse Voltage Parameter Configuration of Electrohydrodynamic Jet Printing on Deposited Droplet Volume

在线阅读下载全文

作  者:王鹏[1] 张嘉容 陈曦 冯天成 张诗雨 刘慧芳[1] Wang Peng;Zhang Jiarong;Chen Xi;Feng Tiancheng;Zhang Shiyu;Liu Huifang(School of Mechanical Engineering,Shenyang University of Technology,Shenyang 110870,China)

机构地区:[1]沈阳工业大学机械工程学院,沈阳110870

出  处:《微纳电子技术》2024年第6期158-164,共7页Micronanoelectronic Technology

基  金:辽宁省教育厅重点攻关项目(LJKZZ20220020)。

摘  要:为了精准控制电流体喷印液滴的最小体积并提高电流体喷印加工的分辨率,研究了电流体喷印的脉冲电压参数配置规律。首先,基于流体力学和电动力学基本原理,分析了喷印过程中泰勒锥的受力情况,并基于此建立了锥射流的体积分数仿真模型,探究了初始脉冲电压参数窗口。然后,搭建了电流体喷印平台,通过实验分析发现沉积液滴体积随脉冲电压幅值增大而减小,随脉冲频率的变化不明显,随着脉冲占空比增大,液滴体积先增大后减小。对比了参数配置前后液滴阵列的沉积液滴体积,参数配置前沉积液滴体积为40.89~45.25 nL,参数配置后平均液滴沉积体积为39.54 nL,验证了脉冲电压参数配置规律的有效性,可为节约生产过程中的材料和人工成本,进一步提高微纳电子产品的使用寿命提供参考。In order to accurately control the minimum volume of droplets in electrohydrodynamic jet printing and improve the resolution of electrohydrodynamic jet printing,the configuration law of pulse voltage parameters in electrohydrodynamic jet printing was studied.Firstly,based on the basic principles of fluid mechanics and electrohydrodynamics,the force on the Taylor cone during the printing process was analyzed,and a volume fraction simulation model of the cone jet was established based on it,and the initial pulse voltage parameter window was explored.Then,an electrohydrodynamic jet printing platform was built.The experimental analysis reveals that the deposited droplet volume decreases with the increase of the pulse voltage amplitude,but changes insignificantly with the pulse frequency.The droplet volume increases firstly then decreases with the increase of the pulse duty cycle.By comparing deposited droplet volumes of the droplet array before and after parameter configuration,the deposited droplet volumes before the parameter configuration are 40.89-45.25 nL,and the average droplet deposited volume after the parameter configuration is 39.54 nL,which verifies the effectiveness of the pulse voltage parameter configuration law.It can provide a reference for saving material and labor costs in the production process and further improving the lifetime of micro-nano electronic products.

关 键 词:电流体动力学 电流体喷印 沉积液滴体积 脉冲电压 占空比 脉冲频率 

分 类 号:TH16[机械工程—机械制造及自动化] TP391.73[自动化与计算机技术—计算机应用技术]

 

参考文献:

正在载入数据...

 

二级参考文献:

正在载入数据...

 

耦合文献:

正在载入数据...

 

引证文献:

正在载入数据...

 

二级引证文献:

正在载入数据...

 

同被引文献:

正在载入数据...

 

相关期刊文献:

正在载入数据...

相关的主题
相关的作者对象
相关的机构对象