基于多节点阵列结构的高精度薄膜温度传感器研究  

Study on High Precision Thin Film Temperature Sensor Based on Multi-node Array Structure

作　　者：田边[1] 刘江江 张仲恺[1] 刘兆钧 马荣[1] 林启敬[1] 蒋庄德[1] TIAN Bian;LIU Jiangjiang;ZHANG Zhongkai;LIU Zhaojun;MA Rong;LIN Qijing;JIANG Zhuangde(State Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University,Xi'an 710043)

机构地区：[1]西安交通大学机械制造系统工程国家重点实验室,西安710043

出　　处：《机械工程学报》2024年第4期92-100,共9页Journal of Mechanical Engineering

基　　金：国家重点研发计划资助项目(2019YFB2004501)。

摘　　要：针对液压系统中的智能感知需求,提出一种新型微机电系统(Micro-electro-mechanical system,MEMS)薄膜温度传感器,其具有微小体积的同时兼具较高的测温精度,可实现液压元件及系统中油液温度信号的精确感知。开发出基于高分子聚合物-金属-陶瓷材料的新型测温材料体系;提出一种多节点的三维阵列式电极结构。针对三维立体曲面高分子聚合物基底上的热电薄膜沉积难题,基于MEMS磁控溅射技术,实现曲面基底上薄膜的图形化转移。测试结果表明,所制备的多节点型薄膜温度传感器在-60~200℃量程内的灵敏度系数可达42μV/℃,从-60~100℃的静态测试中,温度时间漂移率为0.012℃/min,重复性误差为0.32%,最大迟滞为1.3%,满量程误差小于0.5%FS。同时采用脉冲激光法测得传感器的动态响应时间优于0.24 ms。在综合性能测试中,传感器在高速热气流冲击下仍有较高的温度分辨率,同时在不同工质中均可长时间正常工作24 h以上,可满足实际液压系统中长时间保持密封性与稳定性的测温需求。A new micro-electro-mechanical system(MEMS)thin-film temperature sensor is proposed for the intelligent sensing in hydraulic systems,which has a small size and high temperature measurement accuracy to realize the accurate sensing of fluid temperature signals.A new temperature measurement material system based on polymer-metal-ceramic materials is developed.At the same time,a multi-node three-dimensional array electrode structure is innovatively proposed.For the problem of deposition of thermoelectric thin films on three-dimensional curved polymer substrates,the graphical transfer of thin films on curved substrates is realized based on MEMS magnetron sputtering technology.The test results show that the prepared multi-node type thin film temperature sensor can achieve a sensitivity factor of 42μV/℃in the range of-60-200℃,a temperature time drift rate of 0.012℃/min,a repeatability error of 0.32%,a maximum hysteresis of 1.3%and a full scale error of less than 0.5%FS in the static test from-60-100℃.In the comprehensive performance test,the sensor still has a high temperature resolution under the impact of high-speed hot airflow,and can work normally for a long time in different working materials for more than 24 h,which can meet the demand of temperature measurement for a long time to maintain the sealability and stability in the actual hydraulic system.

关 键 词：液压系统 薄膜热电偶 多节点结构 曲面成膜 性能研究 

分 类 号：TH118[机械工程—机械设计及理论]