压力传感器温度补偿薄膜电阻器手工焊接失效分析  

Failure Analysis of Film Resistor by Manual Welding for Pressure Sensors Temperature Compensation

作　　者：林昕怡 周富强 赵彦龙 高德亮 LIN Xinyi;ZHOU Fuqiang;ZHAO Yanlong;GAO Deliang(Unit 93145,Shanghai 200030,China;Xiamen Niell ELectronics Co.,Ltd.,Xiamen 361000,China)

机构地区：[1]93145部队,上海200030 [2]厦门乃尔电子有限公司,福建厦门361000

出　　处：《传感器世界》2024年第4期11-13,27,共4页Sensor World

摘　　要：压力传感器主要有应变式、谐振式和硅压阻式(MEMS)等类型。航空发动机主要以硅压阻式为主,硅压阻式压力传感器受温度影响非常大,一般不能直接使用,需要串并联温度补偿电阻进行温度补偿后才能使用。模拟焊接出现电阻焊接后浮高、偏移不良,通过手工焊接修复后,因反复焊接导致电阻电极损伤,经高低温和振动试验后电阻失效。文章介绍了应用于航空发动机上的压力传感器工作原理,就温度补偿电阻器手工焊接失效原因进行了分析,并提出了改进措施,为压力传感器在生产制造过程中提高可靠性提供了参考。Pressure sensors mainly include strain type,resonant type and micro-electro-mechanical system(MEMS)silicon piezoresistive type.Aircraft engines mainly use MEMS silicon piezoresistive type.MEMS silicon piezoresistive pressure sensors are greatly affected by temperature and cannot be directly used,generally be required to temperature compensation by add series and parallel temperature compensation resistors.Simulated resistance upwarp and deviation after welding,then manual welding repair.The resistance electrode was damaged due to repeated welding.The resistance was failed after high-low temperature and vibration tests.The paper introduces the principle of pressure sensors applied to aircraft engines and analyzes the reasons for manual welding failure of temperature compensation resistors with improvement measures at the same time.The work provides the reference for improving the reliability of pressure sensor in the production and manufacturing process.

关 键 词：薄膜电阻器 手工焊接 失效分析 

分 类 号：TM54[电气工程—电器]