基于光强迭代的单幅干涉图相位提取方法  

Phase Extraction Method for Single Interferogram Based on Light Intensity Iteration

作　　者：张翔宇 田爱玲 刘志强 王红军 刘丙才 朱学亮 Zhang Xiangyu;Tian Ailing;Liu Zhiqiang;Wang Hongjun;Liu Bingcai;Zhu Xueliang(School of Opto-Electronical Engineering,Shaanxi Province Key Laboratory of Thin Films Technology and Optical Test,Xi’an Technological University,Xi’an 710021,Shaanxi,China)

机构地区：[1]西安工业大学光电工程学院,陕西省薄膜技术与光学检测重点实验室,陕西西安710021

出　　处：《光学学报》2024年第7期83-91,共9页Acta Optica Sinica

基　　金：陕西省科技厅项目(2023KXJ-066)。

摘　　要：提出了一种基于光强迭代的单幅干涉图相位提取方法,实现了对单幅干涉条纹图的高精度相位提取。首先通过对原始干涉图进行预处理得到初始相位;将初始相位引入到干涉条纹图的强度表达式中,利用最小二乘法初步得到背景光和调制光;再将初步估计的背景光和调制光代入最初干涉图的强度表达式中以求解待测相位,比较得到的待测相位和初始相位,若不满足迭代精度要求,则重复上述相位求解过程并实现迭代,若求解的相位与初始相位的均方根差值满足收敛条件,则停止迭代。进行仿真和实验研究,得到的Φ100 mm口径平面元件的测量提取结果与实际相位一致。结果表明,该方法在具有较高检测精度的同时能够有效地保证算法的稳定性。Objective Precision optical components are widely employed in various optical systems,and the surface shape quality of optical components directly affects the performance of optical devices.Therefore,surface shape detection of optical components is of great significance.Interferometry is widely recognized as the most effective method for surface shape detection,among which phase-shifting interferometry has higher detection accuracy.However,during the continuous collection of multiple interferograms with phase differences,it is constrained by the performance of the phase-shifting components and easily affected by such objective factors as mechanical vibration and air disturbance in the environment,which decreases the detection accuracy.Therefore,it is not suitable for on-site production testing.In recent years,researchers have proposed a method that combines carrier interferometry with Fourier analysis technology to achieve phase extraction of a single interferogram.However,generally,there are still shortcomings such as large tilt direction edge errors,stripe stacking phenomenon,and low recovery accuracy.To solve the problem of low accuracy in phase extraction of single interferograms in the above phase-solving methods,we propose a new single interferogram phase extraction method based on light intensity iteration.Meanwhile,simulations and experimental research are conducted,with the stability of the algorithm analyzed.Methods We adopt a combination of simulation and experiment methods,analyze and explore the principle of the light intensity iteration method,and employ MATLAB to write algorithm programs while conducting simulation verification.The feasibility,stability,and noise resistance of the algorithm are explored via simulations to ensure the algorithm performance.By conducting 100 sets of simulation simulations,the final phase residuals are compared,and the convergence conditions suitable for solving single interference fringes and the solution interval with the best measurement performance are obtained.To

关 键 词：测量 干涉测量 单幅干涉图 迭代方法 最小二乘法 

分 类 号：O436[机械工程—光学工程]