同步环带子孔径干涉非球面检测方法  

Measurement Method of Aspherical Synchronous Annular Subaperture Interferometry

作　　者：苏媛 田爱玲 王红军 刘丙才 朱学亮 王思淇 任柯鑫 张郁文 Su Yuan;Tian Ailing;Wang Hongjun;Liu Bingcai;Zhu Xueliang;Wang Siqi;Ren Kexin;Zhang Yuwen(Shaanxi Province Key Laboratory of Thin Films Technology and Optical Test,School of Opto-electronical Engineering,Xi'an Technological University,Xi'an 710021,Shaanxi,China)

机构地区：[1]西安工业大学光电工程学院陕西省薄膜技术与光学检测重点实验室,陕西西安710021

出　　处：《光学学报》2024年第8期256-264,共9页Acta Optica Sinica

基　　金：国防基础科研项目(JCKY2020426B009);陕西省科技厅项目(2023KXJ-066)。

摘　　要：提出一种可用于非球面面形检测的同步环带子孔径干涉(SASI)检测方法。该方法利用双焦点透镜形成两个测量波前来匹配非球面不同子孔径区域,进而实现非球面的同步环带子孔径干涉测量。分析SASI检测非球面面形的原理,确定双焦点透镜的焦点间距选取原则,建立子孔径的基准统一模型,通过光学追迹软件辅助建模和坐标变换实现子孔径基准统一与非球面面形重构。结合实例对一个口径为90 mm、顶点曲率半径为317 mm的抛物面进行面形检测实验,SASI方法面形重构结果与Luphoshcan方法检测结果的对比,验证了SASI方法的正确性。该方法在一定程度上扩大了干涉仪直接检测非球面的动态范围,且无需复杂的运动机构就可以同步得到被测非球面两个子孔径区域的干涉图样,加快了检测速度、降低了运动误差对测量精度的影响。Objective Aspherical optical elements are widely employed in optical systems due to their large degree of design freedom,and the surface shape accuracy of the elements directly affects the performance of the optical system,but the normal aberration properties result in difficult detection of aspherical surfaces.Annular subaperture stitching interferometry is non-null interferometry for detecting the surface shape of aspherical surfaces,does not need to completely compensate for the normal aberration of aspherical surfaces,but relies on high-precision mechanical motion mechanisms and complex positional error algorithms.Therefore,we propose a method for synchronous annular subaperture interferometry(SASI)to synchronously obtain the interference pattern of two subapertures.Meanwhile,SASI does not need a complex motion mechanism and can increase the dynamic direct detection range of aspherical surfaces by the interferometer to some extent.Furthermore,it can effectively improve the detection speed and reduce the influence of motion error on measurement accuracy.Methods We adopt the theoretical analysis and the combination of simulations and experiments to carry out this research.Firstly,according to the Nyquist sampling theorem,the theory of the SASI method is analyzed to determine the focal distance principle,and the reference unified model is built by coordinate change and Zemax assisted modeling to realize the surface shape reconstruction.Secondly,the measurement of SASI is simulated and verified,the Zemax is adopted to assist in building the measurement system model,and the interference images obtained by the SASI method and interferometer direct detection are simulated respectively.Additionally,the fringe density of the two interference images is compared,and the aspherical surface shape is reconstructed in the simulated measurement experiments to verify the correctness of the SASI method.Finally,we actually measure the aspherical surface and obtain the interference pattern,and the aspherical surface is placed in

关 键 词：物理光学 干涉测量 非球面检测 非零位测量 同步环形子孔径 

分 类 号：O436.1[机械工程—光学工程]