Ru_(0.26)Sb_(2)Te_(3)合金靶的制备方法及性能研究  

Preparation and Properties Research of Ru_(0.26)Sb_(2)Te_(3) Alloy Target

作　　者：施晨琦 宁哲达 陈天天 闻明[1] 管伟明[1] 王传军[1] Shi Chenqi;Ning Zheda;Chen Tiantian;Wen Ming;Guan Weiming;Wang Chuanjun(Kunming Institute of Preciou Metals,Kunming Guiyan New Material Technology Co.Lrd,State Key Laboratory of Advanced Technologies for Comprehensive Utilization of Platinum Metals,Sino Platinum Metal Co.Lrd.,Kunming 650106,China)

机构地区：[1]昆明贵金属研究所,昆明贵研新材料科技有限公司,稀贵金属综合利用国家重点实验室,贵研铂业股份有限公司,云南昆明650106

出　　处：《稀有金属》2024年第4期595-601,共7页Chinese Journal of Rare Metals

基　　金：云南省重大科技专项项目(202002AB080001-1-7);云南省创新人才项目(202005AD160029)资助。

摘　　要：贵金属Ru掺杂的Sb_(2)Te_(3)相变材料有望改进Sb_(2)Te_(3)结晶温度低、非晶热稳定性差等问题,以满足相变存储器稳定工作的需求。以Ru∶Sb∶Te=0.26∶2∶3(原子比)的Ru_(0.26)Sb_(2)Te_(3)合金粉、Ru+Sb+Te混合粉以及Ru+Sb_(2)Te_(3)混合粉这3种不同体系为原料,经真空热压制备出用于溅射沉积Ru_(0.26)Sb_(2)Te_(3)薄膜的三元靶材,通过X射线衍射(XRD)、扫描电镜(SEM)、共聚焦激光扫描显微镜等分别表征靶材物相、成分、显微组织、元素分布等。结果表明:以Ru_(0.26)Sb_(2)Te_(3)合金粉为原料可制备出成分准确、相对密度达99.5%以上的合金靶材,Ru元素以RuTe2的形式均匀分布于Sb_(2)Te_(3)基体相中,且Ru元素掺杂未对Sb_(2)Te_(3)主相的晶格常数产生明显影响。Ru+Sb+Te混合粉及Ru+Sb_(2)Te_(3)混合粉原料体系所制备Ru_(0.26)Sb_(2)Te_(3)三元靶材的主要物相仍是Sb_(2)Te_(3)相,Ru元素以Ru单质形式存在于靶材中,且相对于Ru_(0.26)Sb_(2)Te_(3)合金粉原料体系,两混合粉原料体系中Ru元素相对集中于某些区域,并未完全分散于整个基体相中。采用Ru_(0.26)Sb_(2)Te_(3)合金粉原料体系制备的三元合金靶材更有望用于Ru-Sb-Te系列相变薄膜的制备。Phase-change random access memory(PCRAM)is regard as the leading candidate for next generation electronic memory hierarchy.Sb-Te based alloys have received a lot of attention in recent years,because of its high crystalline growth velocity and potential as phase change material application.However,the practical application of such materials is severely hindered by several bottle-necks,such as poor thermal stability,low crystallization temperature.It has been shown that Ru doped Sb_(2)Te_(3) phase change material is expected to improve the low crystallization temperature and poor thermal stability of Sb_(2)Te_(3) to meet the stable operation requirements of phase-change memory stability.The preparation of Ru doped Sb_(2)Te_(3)alloy targets was studied in this paper.Three different raw material systems were compared:(1)Ru_(0.26)Sb_(2)Te_(3) alloy powder,(2)Ru+Sb+Te mixed powder and(3)Ru+Sb_(2)Te_(3) mixed powder,in which the atomic ratio of each element was Ru∶Sb∶Te=0.26∶2∶3.For Ru_(0.26)Sb_(2)Te_(3) alloy powder system,the powder was prepared by mixing elemental powders of Ru,Sb and Te in a quartz tube and sealing in vacuum,then Ru-doped Ru_(0.26)Sb_(2)Te_(3) alloy powder was prepared by vacuum melting,mechanical crushing and sieving.The raw material systems of Ru+Sb+Te and Ru+Sb_(2)Te_(3) mixed powder were obtained by ball milling three elemental powders of Ru,Sb and Te,the powder of Ru and the alloy powder of Sb_(2)Te_(3),respectively.Sputtering targets using these powder systems were then prepared by vacuum hot pressing method under 540℃for 40 MPa and 3 h.The phase structure,composition,microstructure and element distribution of the targets were characterized by means of X-ray diffraction(XRD),chemical titration,scanning electron microscope(SEM),energy dispersive analysis(EDS)and confocal laser scanning microscope(CLSM).The actual density of the targets was measured by Archimedes Principle,and the relative density of the target was obtained by comparing with the theoretical density.The results showed t

关 键 词：溅射靶材 相变存储 Ru掺杂 Sb-Te合金 

分 类 号：TG146.3[一般工业技术—材料科学与工程]