空间应用高精度电涡流位移传感器设计与验证  

Design and Verification of High-Precision Eddy Current Displacement Sensor for Space Application

作　　者：刘燕锋 姚宁[1] 袁利 马官营[1] 李玉猛[1] 胡隽 LIU Yanfeng;YAO Ning;YUAN Li;MA Guanying;LI Yumeng;HU Jun(Beijing Institute of Control Engineering,Beijing 100094,China;China Academy of Space Technology,Beijing 100094,China)

机构地区：[1]北京控制工程研究所,北京100094 [2]中国空间技术研究院,北京100094

出　　处：《空间控制技术与应用》2024年第3期86-93,共8页Aerospace Control and Application

基　　金：国家重点研发计划(2021YFB3203100)。

摘　　要：针对空间超静平台高精度非接触位移测量的需求,研制了一种适用于空间应用的高精度电涡流位移传感器.根据传感器工作原理建立探头敏感线圈阻抗模型并对其固有非线性进行仿真分析.基于高精度平衡电桥检测电路,提出一种非线性校正方法,该方法无需额外的校正电路,通过平衡电桥阻抗网络设计以及解调相位设计,将传感器输出非线性由12%降低到0.98%.测试验证结果表明,研制的空间应用高精度电涡流位移传感器在±3 mm量程范围内,测量非线性达到0.98%.该传感器已经成功进行在轨应用.A high-precision eddy current displacement sensor for space application is developed to meet the demand of precision non-contact displacement measurement for ultra-quiet-stable device.Based on the working principle of sensor,the impedance model of the sensor coil is established,and the natural nonlinear characteristic is analyzed.Based on the high-precision balanced-bridge circuit,a nonlinear calibration method is proposed.Without extra cali-brating circuit,the nonlinearity of sensor is reduced from 12%to 0.98%,by the design of balanced-bridge circuit impedance and demodulation phase.The measurement results show that the nonlinearity of high-precision eddy cur-rent displacement sensor is 0.98%in the measurement range of±3mm.And the sensor has already been used in space application.

关 键 词：空间应用 电涡流 位移 传感器 非线性 

分 类 号：V441[航空宇航科学与技术—飞行器设计] TP212[自动化与计算机技术—检测技术与自动化装置]