真空热处理对不锈钢表面TiN薄膜结构及性能的影响  

Effect of vacuum heat treatment on structure and properties of TiN thin film deposited stainless steel surface

作　　者：卢琳琳 刘晨曦 曹航玮 徐洁 刘禹松 范重庆 LU Linlin;LIU Chenxi;CAO Hangwei;XU Jie;LIU Yusong;FAN Chongqing(School of Materials Science and Engineering,Xi’an Polytechnic University,Xi’an 710048,China)

机构地区：[1]西安工程大学材料工程学院,陕西西安710048

出　　处：《西安工程大学学报》2024年第3期32-38,共7页Journal of Xi’an Polytechnic University

基　　金：陕西省自然科学基础研究计划项目(2023-JC-YB-471,2023-JC-YB-476)。

摘　　要：为提高不锈钢材料在海洋环境中的耐腐蚀能力,采用磁控溅射技术在304不锈钢表面沉积TiN薄膜,并在不同温度下对其进行真空热处理,研究热处理温度对TiN薄膜结构及性能的影响。结果表明:适当的真空热处理可提高304不锈钢表面TiN薄膜的结晶度及致密性,缓解其残余应力。与未处理薄膜相比,500℃真空热处理后薄膜内部应力可降低87%,与基底的结合强度提高78%,其腐蚀电流密度由2.42×10^(-6)A/cm^(2)降低到4.43×10^(-7)A/cm^(2),腐蚀电位由-0.247 V提高到-0.044 V,耐腐蚀性能明显提升。In order to improve the corrosion resistance of stainless steel materials in the marine environment,TiN thin films were deposited on the surface of 304 stainless steel by magnetron sputtering technique and vacuum heat-treated at different temperatures,and the effects of the heat-treatment temperature on the structure and properties of the films were investigated.The results show that proper vacuum heat treatment can improve the crystallinity and densification of TiN film on the surface of 304 stainless steel and relieve its residual stress.Compared with the untreated film,the internal stress of the film can be reduced by 87%after the vacuum heat treatment at 500℃,the adhesive strength with the substrate increases by 78%,its corrosion current density is reduced from 2.42×10^(-6) A/cm^(2) to 4.43×10^(-7) A/cm^(2),and the corrosion potential increases from-0.247 V to-0.044 V,which improves the corrosion resistance significantly.

关 键 词：真空热处理 TIN薄膜 不锈钢 残余应力 结合强度 耐腐蚀性 

分 类 号：TG178[金属学及工艺—金属表面处理]