内部气氛含量分析环境下本底材料放气率研究  

Research on material′s outgassing rate during internal gas content analysis

作　　者：罗捷 邱宝军[1] 张烨 蔡宇宏[2] 夏江 周帅[1] 陈海鑫[1] LUO Jie;QIU Baojun;ZHANG Ye;CAI Yuhong;XIA Jiang;ZHOU Shuai;CHEN Haixin(China Electronic Product Reliability and Environmental Testing Research Institute,Guangzhou 510610,China;Lanzhou Institute of Space Technology and Physics,Lanzhou 730000,China)

机构地区：[1]工业和信息化部电子第五研究所,广东广州510610 [2]兰州空间技术物理研究所,甘肃兰州730000

出　　处：《电子元件与材料》2024年第5期625-630,共6页Electronic Components And Materials

摘　　要：气密封装器件的内部气氛含量分析中,设备本底材料放气率是影响分析准确性的重要因素。采用静态升压法,对5种真空设备主要材料在3种典型温度和抽气时间下的放气率进行了深入研究。研究表明,相同条件下304不锈钢、430不锈钢和钛材料的放气率均低于碳素钢和高纯铝,且同种材料在高温环境下的放气率随测试时间增加而增大。最后,基于材料成型等因素,建议选用304不锈钢和430不锈钢作为内部气氛含量分析的腔体环境使用材料,并给出了有效降低本底放气率的措施。For internal gas content analysis of airtight packaging devices,the outgassing rate of the materials of a equipment is a crucial parameter that determine the accuracy of the analysis.Here the outgassing rate of five main materials of a vacuum equipment was studied by using static pressure rise method under three typical conditions of temperature and extraction time.The research shows that the outgassing rate of the 304 stainless steel,430 stainless steel and titanium materials is lower than that of carbon steel and high-purity aluminum under the same condition.And the outgassing rate of the same material increases with test time at high temperature.Finally,by considering material forming and other influential factors,it is suggested to choose the 304 and 430 stainless steel as the materials used in the cavity environment for the internal gas content analysis,and effective measures are given to reduce the background outgassing rate.

关 键 词：内部气氛含量 放气率 气密封装器件 静态升压法 

分 类 号：TN304[电子电信—物理电子学]