Electron beam lithography on nonplanar and irregular surfaces  

作　　者：Chenxu Zhu Huseyin Ekinci Aixi Pan Bo Cui Xiaoli Zhu 

机构地区：[1]Department of Electrical and Computer Engineering and Waterloo Institute for Nanotechnology(WIN),University of Waterloo,Waterloo,ON,Canada

出　　处：《Microsystems & Nanoengineering》2024年第2期1-23,共23页微系统与纳米工程（英文）

摘　　要：E-beam lithography is a powerful tool for generating nanostructures and fabricating nanodevices with fine features approaching a few nanometers in size.However,alternative approaches to conventional spin coating and development processes are required to optimize the lithography procedure on irregular surfaces.In this review,we summarize the state of the art in nanofabrication on irregular substrates using e-beam lithography.To overcome these challenges,unconventional methods have been developed.For instance,polymeric and nonpolymeric materials can be sprayed or evaporated to form uniform layers of electron-sensitive materials on irregular substrates.Moreover,chemical bonds can be applied to help form polymer brushes or self-assembled monolayers on these surfaces.In addition,thermal oxides can serve as resists,as the etching rate in solution changes after e-beam exposure.Furthermore,e-beam lithography tools can be combined with cryostages,evaporation systems,and metal deposition chambers for sample development and lift-off while maintaining low temperatures.Metallic nanopyramids can be fabricated on an AFM tip by utilizing ice as a positive resistor.Additionally,Ti/Au caps can be patterned around a carbon nanotube.Moreover,3D nanostructures can be formed on irregular surfaces by exposing layers of anisole on organic ice surfaces with a focused e-beam.These advances in e-beam lithography on irregular substrates,including uniform film coating,instrumentation improvement,and new pattern transferring method development,substantially extend its capabilities in the fabrication and application of nanoscale structures.

关 键 词：LITHOGRAPHY BEAM COATING 

分 类 号：TB383[一般工业技术—材料科学与工程]