激光干涉仪在机床导轨平行度检测中的应用  

Application of Laser Interferometer in Parallelism Measurement of Machine Tool Guid Rail

作　　者：胡安华 陈大鹏 刘建华 司卫征 唐建豪 卫紫君 Hu Anhua;Chen Dapeng;Liu Jianhua;Si Weizheng;Tang Jianhao;Wei Zijun(Dongfang Electric(Guangzhou)Heavy Machinery Co.,Ltd.,Guangzhou 511400,China;Institute of Intelligent Manufacturing,Guangdong Academy of Sciences,Key Laboratory of Modern Control Technology,Guangzhou 510070,China)

机构地区：[1]东方电气(广州)重型机器有限公司,广州511400 [2]广东省科学院智能制造研究所现代控制技术重点实验室,广州510070

出　　处：《机电工程技术》2024年第6期182-185,共4页Mechanical & Electrical Engineering Technology

基　　金：广州市重点研发计划项目(1523162002、1522167001)。

摘　　要：为检测机床或测量机等导轨之间的平行度,用激光干涉仪和岩石平尺作为主要测量工具,基于最小二乘法求解直线度的原理,通过线与线之间的平行度计算方法,以激光干涉仪的反射镜光轴为基准,采用基准法评价机床导轨的平行度,分析了激光干涉仪检测平行度的方法、符号判断及影响直线度和平行度的因素。用两种不同测量工具测量线与线之间平行度,比较两种测量工具的优势特点,为激光检测机床导轨的平行度检测提供测量依据。实验结果表明,相比于岩石平尺,激光干涉仪常用于大尺寸导轨直线度和平行度的测试,且具有直观、方便、高精度的测量优势;岩石平尺由于本身的材质原因不便携带,且本身精度对直线度和平行度的测量结果有影响。In order to detect the parallelism between machine tools or measuring machines,laser interferometers and rock rulers are used as the main measurement tools.Based on the principle of least squares method to solve straightness,the parallelism calculation method between lines is used,and the reflection mirror optical axis of the laser interferometer is used as the reference to evaluate the parallelism of machine tool guides.The method,symbol judgment,and factors affecting straightness and parallelism of laser interferometers for detecting parallelism are analyzed.The parallelism between lines using two different measuring tools is measured,the advantages and characteristics of the two measuring tools are compared,and a measurement basis for the parallelism detection of laser detection machine tool guides is provided.The experimental results show that compared to rock rulers,laser interferometers are commonly used for testing the straightness and parallelism of large-sized guide rails,and have the advantages of intuitive,convenient,and high-precision measurement.Rock rulers are inconvenient to carry due to their own material,and their accuracy affects the measurement results of straightness and parallelism.

关 键 词：激光干涉仪 平行度测量 平行度 直线度 岩石平尺 

分 类 号：P752[天文地球—海洋科学]