MOEMS光逻辑开关状态监测系统  

MOEMS Optical Logic Switch Status Monitoring System

作　　者：刘林林 曹云[1] 孔啸宇 聂伟荣[1] 席占稳[1] LIU Linlin;CAO Yun;KONG Xiaoyu;NIE Weirong;XI Zhanwen(School of Mechanical Engineering,Nanjing University of Science and Technology,Nanjing 210094,China)

机构地区：[1]南京理工大学机械工程学院,江苏南京210094

出　　处：《探测与控制学报》2024年第3期66-72,共7页Journal of Detection & Control

基　　金：国家自然科学基金项目(51805268)。

摘　　要：为提高MOEMS光逻辑开关的响应速度、减少长时间热积累对激光点火系统的影响,提出在电热式MOEMS光开关中加入状态监测系统。该监测系统包括状态监测单元、驱动电路、控制电路、状态监测电路等,通过在微电热驱动器的运动路径上设置状态监测单元,当微电热驱动器运动到与状态监测单元接触时,状态监测电路识别到接触信号并输出触发信号,从而实现光逻辑开关的快速切换。针对一种电热式MOMES光逻辑开关制作了状态监测系统原理样机,试验结果表明,该系统能够准确识别微电热驱动器的行程状态,光逻辑开关驱动光纤对正与复位的状态响应时间均小于90 ms。In order to improve the response speed of MOEMS optical logic switch and reduce the influence of long-term accumulation on laser ignition system,a status monitoring system was embed in the electro-thermal MOEMS optical switch.The monitoring system included status monitoring units,drive circuits,control circuits,and status monitoring circuits,etc.By setting the status monitoring units on the moving path of the micro electro thermal actuators,when the micro electro thermal actuator moved to contact with the status monitoring unit,the status monitoring circuit recognized the contact signal and output the trigger signal,thus realizing the rapid switching of the optical logic switch.The principle prototype of the status monitoring system was made for a kind of electro-thermal MOMES optical logic switch,and verified by experiments.The results showed that the system could accurately identify the travel status of the micro electro-thermal actuators,and the response time of the optical logic switch to the positive and reset state was less than 90 ms.

关 键 词：MOEMS 激光点火 光开关 状态监测系统 

分 类 号：TJ430.2[兵器科学与技术—火炮、自动武器与弹药工程]