基于基因荧光检测的长波通滤光片研制  

Preparation of Long-pass Filter Based on Gene Fluorescence Detection

作　　者：林亦心 董新康 杨宁 辛亚武 祝晗 彭永超 熊仕富 LIN Yixin;DONG Xinkang;YANG Ning;XIN Yawu;ZHU Han;PENG Yongchao;XIONG Shifu(Tianjin Key Laboratory of Functional Crystal Materials,Institute of Functional Crystals,Tianjin University of Technology,Tianjin,China)

机构地区：[1]天津理工大学功能晶体研究院天津市功能晶体材料重点实验室,天津

出　　处：《光电技术应用》2024年第3期36-41,共6页Electro-Optic Technology Application

摘　　要：光学滤光片是滤去杂质光干扰的重要光学器件,不同波段的滤光片在基因检测得到广泛应用。基于膜系设计理论与薄膜制备工艺,利用电子束蒸发离子辅助沉积技术,以Ta_(2)O_(5)和SiO_(2)为镀膜材料,在JGS1基底玻璃上设计并制备了一种截止中心λ_(0)=520 nm的高反射,透射带λ为530~750 nm的高透射长波通滤光片。通过分析膜层敏感度和电场分布,设置合理的晶控方案,调整工艺参数,避免监控高敏感膜层时石英晶控灵敏度下降,解决光谱透过率降低的问题。研制的滤光片在520 nm处反射率为99.77%,在530~750 nm波段平均透过率为98.58%,可满足应用需求。Optical filter are an important optical device which can filter impurity light interference,and the fil⁃ters with different wavelength bands are widely used in genetic detection.Based on the theory of film system design and film preparation process,by using the technology of electron-beam evaporation-ion-assisted deposition,with Ta_(2)O_(5) and SiO_(2) as the coating materials,a high-transmission long-wavelength pass filter at the cut-off center λ_(0)=520 nm high reflection and transmission bandλ=530~750 nm on the substrate JGS 1 glass is designed and prepared.By analyzing the membrane layer sensitivity and electric field distribution,a rational crystal control scheme is setted and the process parameters are adjusted to avoid a decrease in the quartz crystal control sensitivity when highly sen⁃sitive membrane layers are monitored,thereby,the issue of reduced spectral transmittance is resolved.The prepared filter has 99.77%reflectivity at 520 nm,98.58%average transmittance in the band of 530~750 nm,which meets the application requirements.

关 键 词：光学薄膜 长波通滤光片 膜堆周期 离子辅助沉积 

分 类 号：O484[理学—固体物理]