柔性电控微纳执行器研究进展  

Research progress on flexible,electrically driven microactuators

作　　者：王宁[1,2] 姚晔[3] 刘景全 刘清坤[1] WANG Ning;YAO Ye;LIU JingQuan;LIU QingKun(National Key Laboratory of Advanced Micro and Nano Manufacture Technology,Shanghai Jiao Tong University,Shanghai 200240,China;School of Electronic Information and Electrical Engineering,Shanghai Jiao Tong University Shanghai 200240,China;School of Biomedical Engineering,Shanghai Jiao Tong University,Shanghai 200240,China)

机构地区：[1]上海交通大学微米纳米加工技术全国重点实验室,上海200240 [2]上海交通大学电子信息与电气工程学院,上海200240 [3]上海交通大学生物医学工程学院,上海200240

出　　处：《中国科学：物理学、力学、天文学》2024年第6期43-58,共16页Scientia Sinica Physica,Mechanica & Astronomica

基　　金：国家自然科学基金(编号:24Z990200712)资助项目。

摘　　要：近年来,随着微纳米薄膜制造技术的飞速发展,新型电控微纳米执行器不断涌现.因其具有尺寸小、能直接被集成电路控制、可大批量生产等诸多优点,电控微纳薄膜执行器在微纳机器人、生物医学器件以及智能超材料领域具有广泛的应用.本文综述了近年来电控微纳薄膜执行器的重要突破.首先,阐述了基于化学和物理效应的电致动机制.其次,系统总结了多种类型的电致动薄膜材料,并着重介绍了新兴的纳米薄膜材料.接着,详细介绍了电控微纳薄膜执行器在微纳机器人等领域的重要应用.最后,本文讨论了当前电控微纳薄膜执行器研究中的关键问题和未来发展前景.Recently,with the rapid development of manufacturing technology of micro/nanofilms,new electronically controlled micro/nanoactuators have emerged.Micro/nanoactuators have been widely used in microrobots,biomedical devices,and smart metamaterials due to their advantages of small size,direct control via integrated circuits,and mass production.This review highlights breakthroughs in the field of electronically controlled thin-film micro/nanoactuators.First,the physical and chemical actuation mechanisms of electronically controlled thin films are elaborated.Further,different types of electrically actuated thin-film materials,especially emerging nanofilms,are systematically summarized.In addition,their applications in microrobotics and other related fields are listed.Finally,critical problems and future developments of the micro/nanoactuators are discussed.

关 键 词：纳米薄膜 执行器 电响应 微纳机器人 

分 类 号：TP242[自动化与计算机技术—检测技术与自动化装置] TB383.2[自动化与计算机技术—控制科学与工程]