应用于SOI晶圆的蝶形天线设计与仿真  

Butterfly Antenna Design for SOI Wafers

作　　者：楼蕾荧 Leiying Lou(School of Optical-Electrical and Computer Engineering,University of Shanghai for Science and Technology,Shanghai)

机构地区：[1]上海理工大学光电信息与计算机工程学院,上海

出　　处：《建模与仿真》2024年第3期3096-3102,共7页Modeling and Simulation

摘　　要：绝缘体上硅(SOI)由于其工艺成熟、成本低且与互补金属氧化物半导体(Complementary Metal Oxide Semiconductor,CMOS)制造工艺兼容,被广泛用来制造集成器件,应用在各种光子学领域,片上天线作为光通讯领域接受发射信号不可缺少的模块,被广泛研究应用。本文通过CST Studio Suite建模仿真,设计了一个应用于SOI晶圆的蝶形天线,阻抗匹配为50Ω,谐振频率在0.1 THz,与相应尺寸的扩展半球硅透镜装配在一起,具有18.25 dBi的增益。Silicon on Insulator(SOI)is widely used to manufacture integrated devices for various photonics applications due to its mature process,low cost and compatibility with Complementary Metal Oxide Semiconductor(CMOS)manufacturing processes.As an indispensable module for receiving transmitted signals in optical communication field,on-chip antenna has been widely studied and applied.In this paper,through modeling and simulation of CST Studio Suite,a butterfly antenna is designed for SOI wafers with an impedance matching of 50Ωand a resonant frequency of 0.1 THz.Together with an extended hemispherical silicon lens of the corresponding size,it has a gain of 18.25 dBi.

关 键 词：集成光子学 SOI 蝶形天线 硅透镜 

分 类 号：TN8[电子电信—信息与通信工程]