大行程位移台干涉测距系统的误差补偿  

Error Compensation of Long Stroke Displacement Instrument Interference Ranging System

作　　者：王雨萌 杨帆[1,2] 谌庆荣[1,2] 余斯洋 张茜 孙思[1,2] 严伟 WANG Yumeng;YANG Fan;CHEN Qingrong;YU Siyang;ZHANG Xi;SUN Si;YAN Wei(National Key Lab.of Optical Field Manipulation Science and Technol.,Chinese Academy of Sciences,Chengdu 610209,CHN;Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu 610209,CHN;University of Chinese Academy of Sciences,Beijing 100049,CHN)

机构地区：[1]中国科学院光场调控科学技术全国重点实验室,成都610209 [2]中国科学院光电技术研究所,成都610209 [3]中国科学院大学,北京100049

出　　处：《半导体光电》2024年第2期286-294,共9页Semiconductor Optoelectronics

基　　金：四川省重点研发项目(2022YFG0223);中国科学院科研仪器设备研制项目(YJKYYQ20200060);中国科学院特别研究助理项目(YA23K067)。

摘　　要：双频激光干涉仪作为常用的精密光学非接触式测量设备,具有精度高、抗干扰能力强、灵活性好等优点。然而环境温度变化、机械振动等因素可能会影响其测量结果的准确性,并且影响程度会随着测量光程的增加而增大。针对基于双频激光干涉仪的大行程位移台测距系统,首先研究了位移台测距系统的测量原理,然后针对系统存在的各项误差进行了分析和补偿,最后,对系统进行综合误差补偿实验,短时间补偿量达到10-8 m量级,且时间越长补偿效果越好。该方法较现有的误差补偿方法更为完整,补偿量更大。A dual-frequency laser interferometer,as a commonly used precision optical non-contact measurement device,has the advantages of high precision,strong anti-interference ability,and good flexibility.However,factors such as ambient temperature changes and mechanical vibration may affect the accuracy of the measurement results,and the extent of this influence increases with the optical measurement path.To investigate a large-stroke displacement platform ranging system based on a dual-frequency laser interferometer,the measurement principle of a shifting platform ranging system was first studied.Next,the errors existing in the system were analyzed and compensated.Finally,a comprehensive error compensation experiment was carried out on the system,and the short-term compensation reached the order of 10^(-8)m,with a longer time producing a better compensation effect.The method was more complete than the existing error compensation method,and the compensation was larger.

关 键 词：激光干涉测量 误差补偿 仪器误差 安装误差 环境误差 

分 类 号：TH741[机械工程—光学工程]