一种高性能非蒸散型吸气剂的性能分析  

Performance Analysis of a High-Performance Non-Evaporable Getter

作　　者：王国栋[1] 刘霄 王姣龙 蔡洋洋 张峰 陈长琦[1] 谢远来 WANG Guodong;LIU Xiao;WANG Jiaolong;CAI Yangyang;ZHANG Feng;CHEN Changqi;XIE Yuanlai(School of Mechanical Engineering,Hefei University of Technology,Hefei 230009,China;Institute of Plasma Physics,Hefei Institute of Physical Science,CAS,Hefei 230031,China)

机构地区：[1]合肥工业大学机械工程学院,合肥230009 [2]中国科学院合肥物质科学研究院等离子体物理研究所,合肥230031

出　　处：《真空科学与技术学报》2024年第6期503-510,共8页Chinese Journal of Vacuum Science and Technology

基　　金：国家重大科技基础设施项目(2018-000052-73-01-001228)。

摘　　要：非蒸散型吸气剂(NEG)是高真空和超高真空系统维持真空度的重要材料,具有高稳定性和高气体吸附性能,文章采用粉末冶金的方法制备出Zr_(59.46)V_(29.81)Al_(10.73)吸气剂,并基于小孔流导法搭建了一套吸气剂性能测试的高真空系统,分别测试了气体种类及工作温度对吸气剂性能的影响,实验结果表明:Zr_(59.46)V_(29.81)Al_(10.73)吸气剂对H_(2)、CO_(2)、N2都有很好的吸气性能,其对H_(2)的吸气性能远超N2和CO_(2),但它不吸收He等惰性气体,不同工作温度对吸气性能有很大差异,其最佳工作温度为200℃。利用X射线衍射图谱(XRD)和扫描电子显微镜(SEM)及能量色散图谱(EDS)对吸气剂进行晶相、形貌和成分分析,结果表明Zr_(59.46)V_(29.81)Al_(10.73)吸气剂表面呈现多孔状结构,其主要由α-Zr基固溶体、C15 Laves相及少量Zr_(x)Al_(y)化合物组成,多孔的结构及α-Zr基固溶体、C15 Laves相的高比例有利于吸气剂对活性气体的吸附,因此Zr_(59.46)V_(29.81)Al_(10.73)吸气剂展现出较好的性能。Non evaporable getters(NEGs)are important materials for maintaining vacuum in high and ultra-high vacuum systems,with high stability and gas adsorption.This article uses the powder metallurgy method to prepare Zr_(59.46)V_(29.81)Al_(10.73),and builds a high vacuum system for testing based on the small hole flow conductivity method.The effects of gas type and working temperature on the performance are tested.Through experiments,it is known that Zr_(59.46)V_(29.81)Al_(10.73) has good suction performance for H_(2),CO_(2),and N2,and has the best performance for H_(2),but it does not absorb inert gases such as He.At the same time,it indicates that the working temperature has a significant impact and the optimal working temperature is 200℃.The crystal phase,morphology,and composition of the adsorbent were analyzed using X-ray diffraction(XRD),scanning electron microscopy(SEM),and energy dispersive spectroscopy(EDS).The results showed that the surface of the alloy exhibited a porous structure,mainlyα-Zrcomposed of,C15 Laves phase,and some Zr_(x)Al_(y) compound.The structures and phase components are conducive to the adsorption of gases.

关 键 词：非蒸散型吸气剂 粉末冶金 性能测试 形貌分析 晶相结构 

分 类 号：TB741[一般工业技术—材料科学与工程]