临近空间飞行高温真空光纤绝压传感器设计  

Design of high-temperature vacuum fiber optic absolute pressure sensor for near-space vehicles

作　　者：张雨彤 江毅[1,2] 杨水旺 张大有 ZHANG Yutong;JIANG Yi;YANG Shuiwang;ZHANG Dayou(School of Optics and Photonics,Beijing Institute of Technology,Beijing 100081,China;Key Laboratory of Photonic Information Technology,Ministry of Industry and Information Technology,Beijing 100081,China;School of Physical Science and Technology,Baotou Teachers'College,Baotou 014030,China;Beijing Zhenxing Institute of Metrology and Measurement,Beijing 100074,China;Beijing Aerospace Institute for Metrology and Measurement Technology,Beijing 100076,China)

机构地区：[1]北京理工大学光电学院,北京100081 [2]信息光子技术工业和信息化部重点实验室,北京100081 [3]包头师范学院物理科学与技术学院,内蒙古包头014030 [4]北京振兴计量测试研究所,北京100074 [5]北京航天计量测试技术研究所,北京100076

出　　处：《火箭推进》2024年第3期118-123,共6页Journal of Rocket Propulsion

基　　金：国家自然科学基金(U20B2057)。

摘　　要：研制了一种用于临近空间飞行器在高温环境下的蓝宝石非本征法布里-珀罗干涉仪(extrinsic Fabry-Perot interferometer,EFPI)型光纤绝对压力传感器。蓝宝石晶片压力传感头由3片厚度不同的蓝宝石晶片键合构成,形成复合法布里-珀罗(Fabry-Perot,FP)腔,可以同时测量温度和绝对压力,通过实时监测温度,对压力测量进行温度补偿,去除温度对压力测量的影响。实验结果表明:900℃内的每个温度点下,密封FP腔的光学腔长随压力线性变化;室温下,压力灵敏度为11.6 nm/kPa,压力灵敏度随温度的上升略微升高,压力测量的分辨率达到86 Pa。A sapphire-based extrinsic Fabry-Perot interferometer(EFPI)fiber optic absolute pressure sensor for near-space vehicles in high-temperature environment is developed and experimentally demonstrated.The sapphire wafer sensor head is composed of three sapphire wafers with different thicknesses bonded to form composite Fabry-Perot(FP)cavities,which can realize the simultaneous measurement of temperature and absolute pressure.By monitoring the temperature in real time,the pressure measurement is compensated to eliminate the influence of temperature on the pressure measurement.Experiment results show that the optical cavity length of the sealed FP cavity varies linearly within the applied pressure at each temperature point below 900℃.At room temperature,the pressure sensitivity is 11.6 nm/kPa and increases slightly with the increase of temperature.The resolution of the pressure measurement is 86 Pa.

关 键 词：光纤压力传感器 非本征法布里-珀罗干涉仪 蓝宝石晶片 绝对压力测量 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]