具有大应变梯度的柔性SrRuO_(3)褶皱薄膜的设计  

Design of Flexible SrRuO_(3) Wrinkled Films with Strain Gradient

作　　者：朱丽雯 舒龙龙 梁任宏 沈国阳 王支国 柯善明 Zhu Liwen;Shu Longlong;Liang Renhong;Shen Guoyang;Wang Zhiguo;Ke Shanming(School of Physics and Material Science,Nanchang University,Nanchang 330031,China;School of Physics and Materials Science,Guangzhou University,Guangzhou 510006,China)

机构地区：[1]南昌大学物理与材料学院,江西南昌330031 [2]广州大学物理与材料科学学院,广东广州510006

出　　处：《宁夏大学学报（自然科学版）》2024年第2期203-208,共6页Journal of Ningxia University(Natural Science Edition)

基　　金：国家自然科学基金资助项目(51962020,12174174)。

摘　　要：应变梯度工程在以薄膜为载体的柔性存储器和柔性传感器等领域具有重要的应用潜质.然而,在薄膜材料中保持柔性的同时兼顾实现大的应变梯度仍存在技术瓶颈.本论文通过水溶性牺牲层,在柔性衬底PDMS上制备了结构可控的SrRuO_(3)褶皱.研究表明,这种褶皱结构能够产生5.4×10^(4)m^(-1)应变梯度.此外,在特定的厚度区间内,通过调节褶皱厚度,可以精确地控制其结构和应变梯度的大小,从而实现在保持SrRuO_(3)薄膜柔性的同时,获得大且稳定的应变梯度.本论文设计的褶皱薄膜制备方法,不仅可为后续深入理解柔性薄膜的物理性能提供材料范式,更可为薄膜材料走向存储和传感器件化应用打下基础.Strain gradient engineering holds important potential for applications in flexible memory and flexible sensors based on thin films.However,maintaining flexibility in thin film materials while achieving large strain gradients remains a technical challenge.This study presents the preparation of SrRuO_(3) wrinkles with controlla-ble structures on flexible PDMS substrates using a water-soluble sacrificial layer.Studies have shown that this wrinkle structure can produce a strain gradient of 5.4×10^(4) m^(-1).In addition,within a specific thickness range,the structure and strain gradient can be precisely controlled by adjusting the thickness of the wrinkle,thereby achieving a large and stable strain gradient while maintaining the flexibility of the SrRuO_(3) film.The preparation method of wrinkled films designed in this study not only provides a material paradigm for further understanding of the physical properties of flexible films,but also lays the foundation for the application of thin film materials in storage and sensor devices.

关 键 词：SrRuO_(3)薄膜 褶皱 柔性 应变梯度 挠曲电效应 

分 类 号：TB34[一般工业技术—材料科学与工程]