低偏振超宽光谱分色膜设计与制备  

Design and fabrication of an ultra-broadband dichroic beamsplitter with low polarization

作　　者：于天燕 秦杨[1,2] 蒋林 段微波[1,2] 刘定权 YU Tian-Yan;QIN Yang;JIANG Lin;DUAN Wei-Bo;LIU Ding-Quan(Shanghai Key Laboratory of Optical Coatings and Spectral Modulation,Shanghai 200083,China;Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China)

机构地区：[1]上海市光学薄膜与光谱调控重点实验室,上海200083 [2]中国科学院上海技术物理研究所,上海200083

出　　处：《红外与毫米波学报》2024年第3期406-412,共7页Journal of Infrared and Millimeter Waves

摘　　要：可见/红外超宽光谱分色片是星载中分辨率光谱成像仪Ⅲ型光学系统中的重要光学薄膜器件。利用诱导透射原理,采用金属-介质膜系结构加非对称等效导纳匹配层,实现了45°入射时0.4~1.05μm光谱高效透射,1.35~13μm波段光谱高效反射,从而将入射光束分配到不同的光路。同时通过消偏振控制设计,获得了可见近红外波段低偏振灵敏度(LPS)。所研制的分色片可见近红外波段平均透射率大于85%,LPS小于4%;短波及长波红外波段平均反射率大于90%。This paper describes the design and fabrication of one kind of dichroic beam-splitter that operates in an ultrabroadband spectral range from visible to longwave infrared regions simultaneously.The use of metal-dielectric coatings makes it implement structures that transmit the visible/near infrared radiation from 0.4 to 1.05μm and reflect infrared radiation from 1.36 to 13μm.At the same time,the structures are designed to obtain a low linear polarization sensitivity(LPS)in the visible/near infrared region.The transmission of visible/near infrared region is more than 85%and the average reflection of infrared region is more than 90%.The LPS of the region 0.4-1.05μm is less than 4%.

关 键 词：光学薄膜 超宽光谱分色片 诱导透射 偏振灵敏度 

分 类 号：O436[机械工程—光学工程] TN214[理学—光学]