用于VCSEL阵列光分布调控的自由曲面透镜阵列设计  

Freeform Lens Array Design for Precise Control of Irradiance Distribution in VCSEL Array

作　　者：薛宇扬 苏宙平[1,2] Xue Yuyang;Su Zhouping(School of Science,Jiangnan University,Wuxi 214122,Jiangsu,China;Jiangsu Provincial Research Center of Light Industrial Opto-Electronic Engineering and Technology,Wuxi 214122,Jiangsu,China)

机构地区：[1]江南大学理学院,江苏无锡214122 [2]江苏省轻工光电工程技术研究中心,江苏无锡214122

出　　处：《光学学报》2024年第9期211-218,共8页Acta Optica Sinica

摘　　要：针对垂直腔面发射激光器(VCSEL)设计了自由曲面整形透镜,使VCSEL输出光束在目标面呈均匀的辐照度分布。自由曲面透镜前表面为非球面,后表面为自由曲面。在设计自由曲面的设计过程中,在自由曲面透镜中间区域设置虚拟平面,根据虚拟平面和目标面能量之间的关系,确定自由曲面入射光束和出射光束的方向矢量,获得自由曲面采样点上各点的法向矢量。自由曲面的矢高和法向矢量之间构成了一个泊松方程。引进离散余弦变换的方法求解泊松方程,获得了自由曲面的矢高。模拟结果表明使用自由曲面整形透镜可将目标面辐照度均匀度提升到93.9%。为了适应在高功率场景中的应用,基于单个VCSEL模组的辐照度分布,应用蚁狮算法优化VCSEL模组之间的距离,对VCSEL模组阵列进行了二次光分布调控,使得阵列在目标面上的辐照度均匀度可以达到85.2%,光效率达到91.8%。Objective The vertical-cavity surface-emitting laser(VCSEL)is a typical semiconductor laser widely employed in highspeed optical communication,optical sensors,pumped solid-state lasers or fiber lasers,LiDAR,and structured light applications.The irradiance distributions of the VCSELs typically conform to a Gaussian distribution.In various application scenarios such as laser processing and laser illumination,it is necessary to achieve a uniform irradiance distribution on the target plane.Among various methods for laser shaping,freeform optical components have gained increasing popularity due to their high optical efficiency and flexibility in controlling light distribution.However,there is a paucity of literature regarding the utilization of freeform optical elements for shaping VCSEL lasers,particularly in terms of designing freeform surfaces to manipulate irradiance distribution for VCSEL array modules.In this paper,we present the design of both a freeform lens and a freeform lens array specifically and tailor the light distributions for single VCSEL sources and VCSEL arrays respectively to achieve a uniform irradiance distribution on the target plane.Methods The design of a freeform shaping lens for VCSELs aims to achieve a uniform irradiance distribution on the target surface for the output beam.The front surface of the lens is aspherical,while the back surface is freeform.The rays emitted by the VCSEL are collimated through the aspherical surface,and the collimated beam is then incident on the freeform surface,through which the irradiance distribution is regulated to produce a uniform irradiance distribution on the target plane.During the design process,a virtual surface is incorporated within the middle region of the freeform lens to establish a relationship between its energy distribution and that of the target plane.This enables the determination of direction vectors of incident and outgoing rays,as well as obtaining normal vectors for each point on the sample points of the free-form surface.By formulating

关 键 词：光学设计 垂直腔面发射激光器 自由曲面 泊松方程 离散余弦变换 

分 类 号：O436[机械工程—光学工程]