内置温控多模耦合半导体激光器研究  

Research on Multi-Mode Coupled Semiconductor Lasers with Built-In Temperature Control

作　　者：程义涛[1] 王英顺[1] 吴浩仑 武艳青 晏青 Cheng Yitao;Wang Yingshun;Wu Haolun;Wu Yanqing;Yan Qing(The 13^(th)Research Institute,CETC,Shijiazhuang 050051,China)

机构地区：[1]中国电子科技集团公司第十三研究所,石家庄050051

出　　处：《微纳电子技术》2024年第7期62-69,共8页Micronanoelectronic Technology

摘　　要：随着半导体激光光源在通信、探测等领域应用的不断扩展,常规多模半导体光纤耦合模块功率温度特性不能满足使用需求,因此有必要研制高稳定性多模耦合半导体激光器。研制了一种内置温控的多模耦合半导体激光器。针对器件的封装耦合进行了光纤耦合设计和散热设计,并对制作的器件的光电参数进行了测试,重点测试了宽温范围内的输出功率与功率变化率。测试结果表明:光纤芯径为105μm、数值孔径(NA)为0.22时,室温下光纤输出功率大于3.1 W,耦合效率达到94%以上;在温度范围-45~70℃内,典型温度点下输出功率变化率低于1%。该内置温控多模耦合半导体激光器的研制为半导体激光器在泵浦领域的进一步应用提供了技术参考。With the continuous expansion of the application of semiconductor laser light sources in the fields of communication and detection,the power temperature characteristic of conventional multi-mode semiconductor fiber coupled module can not meet the usage requirement,so it is necessary to develop high stability multi-mode coupled semiconductor laser.A multi-mode coupled semiconductor laser with built-in temperature control was developed.The optical fiber coupling design and heat dissipation design are carried out for the package coupling of the device,and the photoelectric parameters of the fabricated device were tested,especially the output power and power change rate in the wide temperature range.The test results show that when the core diameter of the fiber is 105μm and the numerical aperture(NA)is 0.22,the output power of the fiber is above 3.1 W at room temperature and the coupling efficiency is above 94%.In the temperature range of-45-70℃,the output power change rate is less than 1%at typical temperature points.The development of the multi-mode coupled semiconductor laser with builtin temperature control provides a technical reference for the further application of the semiconductor laser in the pumping field.

关 键 词：耦合 封装 半导体激光器 多模 内置温控 蝶形封装 

分 类 号：TN305.94[电子电信—物理电子学] TN365