一种分时差分的频率调制MEMS加速度计  

A temporal-difference frequency-modulated MEMS accelerometer

作　　者：汪鹏 黄丽斌[1,2] 丁徐锴[1,2] WANG Peng;HUANG Libin;DING Xukai(School of Instrument Science and Engineering,Southeast University,Nanjing 210096,China;Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology of Ministry of Education,Southeast University,Nanjing 210096,China)

机构地区：[1]东南大学仪器科学与工程学院,南京210096 [2]东南大学微惯性仪表与先进导航技术教育部重点实验室,南京210096

出　　处：《中国惯性技术学报》2024年第6期598-603,612,共7页Journal of Chinese Inertial Technology

基　　金：装备预研项目(50917020201)。

摘　　要：为提升MEMS加速度计温度适应性,设计了频率调制和分时差分方法。基于静电刚度效应,将敏感质量块因加速度产生的位移变化调制成谐振频率的变化,兼顾了位移检测的温度系数较低与谐振频率检测不易受电路噪声干扰的优点,且采用单个谐振器在时间上通过刚度切换进行分时差分,从而降低零偏随温度的漂移。通过实验测得,在10 V调谐电压下,加速度计室温下的零偏稳定性为76.79μg。-40℃~60℃全温范围内经过分时差分后得到的频差全温变化量为-0.072 Hz,相较于单个刚度状态下的谐振频率变化约7.7 Hz,减小了约99%,验证了静电刚度频率调制和分时差分的有效性。In order to improve the temperature adaptability of MEMS accelerometer,frequency modulation and time-difference method are designed.This accelerometer utilizes the electrostatic stiffness effect to modulate the displacement change of the proof mass due to acceleration into the change of resonant frequency.This accelerometer combines the advantages of low temperature coefficient in displacement detection and less susceptibility to circuit noise interference in resonant frequency detection.And only one resonator is used,but differencing in time through stiffness switching,thus achieving a low zero bias with temperature.The experimental results show that,at 10 V tuning voltage,the zero bias stability is 76.79μg at room temperature.The frequency difference obtained after the temporal difference is-0.072 Hz,which is reduced by about 99%compared with the resonant frequency variation of about 7.7 Hz under a single stiffness state.These results verify the effectiveness of electrostatic stiffness frequency modulation and temporal difference.

关 键 词：MEMS加速度计 静电刚度频率调制 分时差分 

分 类 号：U666.1[交通运输工程—船舶及航道工程]