HiPIMS制备Cr/CrCN多层涂层的结构及耐腐蚀性能研究  

Study on the Structure and Corrosion Resistance of Cr/CrCN Multilayer Coatings Prepared by HiPIMS

作　　者：谭诗瑶 王丽 张美琪 王振玉 王应泉 汪爱英[2] 柯培玲 TAN Shiyao;WANG Li;ZHANG Meiqi;WANG Zhenyu;WANG Yingquan;WANG Aiying;KE Peiling(School of Materials Science and Chemical Engineering,Ningbo University,Ningbo 315211,China;Key Laboratory of Advanced Marine Materials,Ningbo Institute of Materials Technology and Engineering,Chinese Academy of Sciences,Ningbo 315201,China;Ningbo Runner Co.,Ltd.,Ningbo 315000,China)

机构地区：[1]宁波大学材料科学与化学工程学院,浙江宁波315211 [2]中国科学院宁波材料技术与工程研究所海洋关键材料重点实验室,浙江宁波315201 [3]宁波威霖住宅设施有限公司,浙江宁波315000

出　　处：《材料保护》2024年第7期43-51,共9页Materials Protection

基　　金：宁波市重点研发计划(2023Z110,2022Z011,2023Z022)。

摘　　要：PVD方法沉积的Cr涂层因耐腐蚀性能较差而难以大规模应用,利用复合多层膜层结构设计能打断贯穿性柱状晶生长,减小孔隙率,提高PVD沉积Cr涂层的耐蚀性。采用高功率脉冲磁控溅射(HiPIMS)耦合同步脉冲偏压技术,在316L不锈钢基体表面沉积Cr/CrCN多层涂层。利用SEM、XRD、EDS和Raman表征了涂层的形貌、组成与组织结构,采用电化学测试、酸性盐雾测试研究了4种不同甲烷流量下(5,15,25,35 sccm)制备的Cr/CrCN多层涂层的耐腐蚀性能。结果表明:引入CrCN中间层有效打断了柱状晶的贯穿性生长,涂层表现出致密平整的表面形貌;4种Cr/CrCN多层涂层均对基体具有较好的保护作用,涂层改性样品相比基体的腐蚀电流密度下降;酸性盐雾腐蚀48 h后,通入甲烷流量为25 sccm的多层涂层表面未出现明显的孔蚀现象,表现出最优异的耐腐蚀性能。HiPIMS制备Cr/CrCN多层涂层能够有效提高316L不锈钢的耐腐蚀性能,可为PVD镀Cr涂层的耐蚀性能优化设计和工业化应用提供参考。The Cr coating deposited by PVD method is difficult to apply on a large scale due to its poor corrosion resistance.The use of composite multilayer coating structure design can interrupt the growth of penetrating columnar crystals,reduce porosity and improve the corrosion resistance of PVD deposited Cr coatings.In this work,Cr/CrCN multilayer coatings were deposited on the surface of 316L stainless steel substrate by highpower pulsed magnetron sputtering(HiPIMS)coupled with synchronous pulse bias technology.The morphology,composition and microstructure of the coating were characterized using SEM,XRD,EDS and Raman.The corrosion resistance of Cr/CrCN multilayer coatings prepared under four different methane flow rates(5,15,25,35 sccm)was studied by electrochemical and acid salt spray tests.Results showed that the introduction of CrCN intermediate layer effectively interrupted the penetrating growth of columnar crystals,and the coating exhibited a dense and flat surface morphology.All four Cr/CrCN multilayer coatings had a good protective effect on the substrate,and the corrosion current density of the coating modified samples decreased compared to the substrate.After 48 h of acidic salt spray corrosion,the surface of the multilayer coating prepared with a methane flow rate of 25 sccm did not show obvious pitting corrosion,demonstrating the best corrosion resistance performance.In general,the Cr/CrCN multilayer coatings prepared by HiPIMS could effectively improve the corrosion resistance of 316L stainless steel,which provided reference for the optimization design and industrial application of corrosion resistance of PVD Cr plated coatings.

关 键 词：Cr/CrCN HIPIMS 复合多层涂层 耐腐蚀性 

分 类 号：TG174.4[金属学及工艺—金属表面处理]