基于超短脉冲激光刻蚀的双解耦MEMS陀螺仪调频技术研究  

Research on frequency modulation technology of double decoupling MEMS gyroscope based on ultrashort pulse laser etching

作　　者：刘玉县[1] 侯帅康 赵前程[1] 崔健[1] 张大成[1] LIU Yuxian;HOU Shuaikang;ZHAO Qiancheng;CUI Jian;ZHANG Dacheng(School of Integrated Circuits,Peking University,Beijing 100871,China;School of Electrical and Information Engineering,Zhengzhou University,Zhengzhou 450001,China)

机构地区：[1]北京大学集成电路学院,北京100871 [2]郑州大学电气与信息工程学院,河南郑州450001

出　　处：《传感器与微系统》2024年第7期39-42,共4页Transducer and Microsystem Technologies

摘　　要：以双解耦双质量硅微陀螺仪为主要研究对象,从微观结构入手,分析其工作原理和双解耦运动模型,并提出影响模态特征频率的因素。提出一种改变陀螺仪弹性梁结构厚度来调整其特征频率的方法,建立模型通过Comsol软件仿真陀螺仪梁厚度变化对特征频率的影响关系,并选择皮秒激光刻蚀系统刻蚀陀螺弹性梁厚度,测试其两模态特征频率。测试结果表明:对应频率变化符合理论推导和仿真趋势。Dual-decoupling dual-mass silicon micro-gyroscope is taken as research target.Start from the microstructure,its working principle and double decoupling motion model are analyzed,and the factors which affect mode characteristic frequency are proposed.A method changing the thickness of gyroscope elastic beam structure to adjust its characteristic frequency is proposed,establish a model,influence relation of gyroscope beam thickness change on characteristic frequency is simulated by Comsol software,and the picosecond(ps)laser etching system is chosen to etch thickness of gyroscope elastic beam,test its two-mode characteristic frequency.Test result shows tha the corresponding frequency change conforms to the theoretical derivation and simulation trend.

关 键 词：微机械陀螺 结构解耦 频率调节 短脉冲激光 

分 类 号：TP242[自动化与计算机技术—检测技术与自动化装置]