用于高压测量的MEMS硅-玻光纤FP压力传感器  

MEMS silicon-glass fiber-optic FP pressure sensor for high-pressure measurements

作　　者：付雨薇 王睿楠 唐文婷 杜喜昭 王伟[1] 陈海滨[1] FU Yu-wei;WANG Rui-nan;TANG Wen-ting;DU Xi-zhao;WANG Wei;CHEN Hai-bin(College of Optoelectronic Engineering,Xi’an Technological University,Xi’an 710021,China;College of Engineering,Xi’an International University,Xi’an 710077,China)

机构地区：[1]西安工业大学光电工程学院,陕西西安710021 [2]西安外事学院工学院,陕西西安710077

出　　处：《中国光学（中英文）》2024年第4期771-779,共9页Chinese Optics

基　　金：陕西省重点研发计划(No.2023-GHZD-52);陕西省教育厅重点研究计划(No.22JY026)。

摘　　要：研究了一种基于微机电系统(MEMS)技术用于高压测量的硅-玻光纤法布里-珀罗(FP)压力传感器。该传感器以硅材料作为敏感元件,将电感耦合等离子体(ICP)干法刻蚀后的单晶硅膜片和高硼硅玻璃阳极键合构成FP腔。传感头使用MEMS技术批量制造,结构稳定、抗过载能力强、在高压环境下不容易失效。实验结果表明,该传感器能够实现30 MPa的高压压力测量,灵敏度为46.94 nm/MPa,线性拟合度为0.99897,测量结果具有较好的一致性和可靠性,所设计的压力传感器在高压检测方面有很强的应用前景。We investigate a silicon-glass fiber-optic Fabry-Perot(FP)pressure sensor based on Micro-Elec-tro-Mechanical Systems(MEMS)technology for high-pressure measurements.Silicon material was used as the sensitive element,and the Inductively Coupled Plasma(ICP)dry-etched monocrystalline silicon dia-phragm was anode bonded with a high borosilicate glass to form the FP cavity.The sensor head was manu-factured in batches utilizing MEMS technology,which is structurally stable,strongly resistant to overload,and not prone to fail in high-pressure environments.The experimental results show that the sensor can acheive high-pressure measurements up to 30 MPa with a sensitivity of 46.94 nm/MPa and a linearity of 0.99897,with high consistency and reliable measurement results.The designed pressure sensor has strong application prospects in high-pressure sensing.

关 键 词：MEMS 光纤传感器 压力测量 FP干涉 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]