大口径多波段光束质量检测系统设计  

Design of large-aperture multi-band beam quality detection system

作　　者：刘才 于信[1] 潘国涛 贺国强 倪小龙[1] 白素平[1] LIU Cai;YU Xin;PAN Guo-tao;HE Guo-qiang;NI Xiao-long;BAI Su-ping(School of Opto-Electronic Engineering,Changchun University of Science and Technology,Changchun 130022,China;Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China)

机构地区：[1]长春理工大学光电工程学院,吉林长春130022 [2]中国科学院长春光学精密机械与物理研究所,吉林长春130033

出　　处：《中国光学（中英文）》2024年第4期932-942,共11页Chinese Optics

基　　金：国家自然科学基金青年基金资助项目(No.62205032);吉林省科技发展计划项目(No.20210201139GX);长春理工大学青年基金(No.XQNJJ-2019-01)。

摘　　要：光谱合成技术是实现高能激光输出的重要技术途径,如何在高功率输出的前提下,保证高光束质量的激光输出已成为当前光谱合成技术最迫切要解决的问题。本文针对155 mm×140 mm矩形口径、(1 064±3)nm、(1 030±3)nm和(635±5)nm波段光束的参数检测问题,设计了大口径多波段多参数检测系统。波前检测单元基于开普勒的望远结构,在构建变形镜与微透镜共轭关系的同时,压缩光束口径以匹配探测器尺寸。前组物镜采用卡塞格林结构,以解决大口径、多波段的色差校正难题;后组镜采用三片式复消色差折射镜组,补偿色差的同时,兼顾无热化设计,用以补偿前组物镜的残余热差和后组镜热差。经波前检测单元后进行分光探测,实现光束质量和光束均匀性检测。为了提高系统的环境适应性,采用光学被动无热化方法对系统进行了20℃±10℃的无热化设计。最后,对系统进行装调测试,采用泽尼克波前复原方法对波前探测相机采集的光斑图像进行波前复原,测得10℃~30℃下系统波前的RMS值优于0.052 4λ(λ=632.8 nm),光束均匀性优于0.893,光束质量β因子优于1.26倍衍射极限。Spectral synthesis technology is an important technical approach to achieving high-energy laser output.Ensuring high-quality laser output under the premise of high-power output has become the most ur-gent goal in further developing spectral synthesis technology.Aiming at the challenge of parameter detection for 155 mm×140 mm rectangular aperture,(1064±3)nm,(1030±3)nm,and(635±5)nm band beams,we design a large-aperture multi-band multi-parameter detection system.The wavefront detection unit is based on Kepler’s telescopic structure,the conjugate relationship between the deformable mirror and the mi-crolens is constructed,at the same time,the compressed beam matches the detector size.The front group ob-jective lenses adopt a Cassegrain structure to solve the problem of color difference correction in large-aper-ture and multi-band.The rear group of mirrors adopts a three-piece apochromatic refractor group,which compensates for the color difference while accounting for the non-thermal design.It can be used for com-pensation to the residual thermal difference of the front group of objectives and the thermal difference of the rear group of mirrors.After passing through the wavefront detection unit,the beam quality and beam uni-formity can be measured.In order to improve the environmental adaptability of the system,it was designed through an optical passive anthermic method at 20℃±10℃.Finally,the system was installed and tested,and the wavefront spot image collected by the wavefront detection camera was restored using the Zernike wavefront restoration method.The measured RMS value of the wavefront of the system is better than 0.0524λ(λ=632.8 nm),the beam uniformity is better than 0.893,and the beam quality β factor is better than 1.26 times the diffraction limit at 10℃-30℃.

关 键 词：多波段多参数检测 无热化设计 波前测量 光束均匀性 光束质量 

分 类 号：TG502.33[金属学及工艺—金属切削加工及机床] TH74[机械工程—光学工程]