超高陡度长波通拉曼滤光片的研制  

Development of Ultra-High Steepness Edge Long Wave Pass Raman Filter

作　　者：白皓宇 姚春龙[1] 董明 秦瑞 白永浩 王奕楠 BAI Hao-yu;YAO Chun-ong;DONG Ming;QIN Rui;BAI Yong-hao;WANG Yi-nan(Shenyang Academy of Instrumentation Science Co.,Ltd.,Shenyang 110043,China)

机构地区：[1]沈阳仪表科学研究院有限公司,辽宁沈阳110043

出　　处：《真空》2024年第4期12-16,共5页Vacuum

摘　　要：长波通滤光片是拉曼光谱仪中滤除瑞利散射光的重要光学元件,更高的陡度能进一步提升其检测精度和范围。介绍了超高陡度长波通膜系设计方案与超多膜层高精度膜厚控制技术,基于磁控溅射技术实现了超高陡度长波通滤光片产品的制造。测试表明该产品的陡度优于0.5%,通带波纹优于4%,可实现532nm激光附近最低100 cm^(-1)的低波数拉曼检测。Long wave pass filters are important optical components in Raman spectrometers that filter out Rayleigh scattering light,and higher steepness can further improve their detection accuracy and range.The design scheme of ultra-high steepness long wave pass film system and high-precision film thickness control technology of ultra-multiple film layers were introduced.The ultra-high steepness long wave pass film product manufacturing was achieved based on magnetron sputtering technology.The test results show that product has a steepness of better than 0.5%and a passband ripple of better than 4%,which can achieve a minimum of 100 cm^(-1)low wavenumber Raman detection near 532 nm laser.

关 键 词：长波通滤光片 陡度 磁控溅射 拉曼检测 

分 类 号：O484.41[理学—固体物理]