分子泵体积流率检测标准方法的探讨  

Discussion on the Standard Method for Detecting Volume Flow Rate of Molecular Pump

作　　者：乔忠路 王玲玲 李智慧 刘诗梦 宋青竹 战春鸣 QIAO Zhong-u;WANG Ling-ing;LI Zhi-hui;LIU Shi-meng;SONG Qing-zhu;ZHAN Chun-ming(National Quality Inspection and Testing Center for Vacuum Equipment,Shenyang 110042,China;Shenyang Vacuum Technology Institute Co.,Ltd.,Shenyang 110042,China)

机构地区：[1]国家真空设备质量检验检测中心,辽宁沈阳110042 [2]沈阳真空技术研究所有限公司,辽宁沈阳110042

出　　处：《真空》2024年第4期58-64,共7页Vacuum

摘　　要：全面论述了分子泵的发展、体积流率检测方法及应用等内容。介绍了分子泵体积流率测量的国内外标准,重点探讨了流量法和小孔法两种体积流率测试方法,以FF-160/620C分子泵为对象,分别用这两种方法测量了其在特定压力下的体积流率,详细介绍了测量原理、流程、结果及不确定度。结果表明,在流量计满足要求的情况下,流量法更具优势。最后介绍了分子泵在特殊工况下如强磁、耐腐蚀等环境下的测量方法和意义。The development of molecular pumps,detection methods and applications of volume flow rate are comprehensively discussed.The domestic and international standards for volume flow rate measurement of molecular pumps are introduced,and two volume flow rate test methods,the flow method and the orifice method are focuses on.Taking the FF-160/620C molecular pump as the object,the volume flow rate under specific pressure is measured by the two methods respectively.The principle,process,results and uncertainty are introduced in detail.It is concluded that the flow method has greater advantages when the flowmeter meets the requirements.Finally,the measurement methods and significance of molecular pumps in special working conditions,such as strong magnetic and corrosion-resistant environments,are introduced.

关 键 词：分子泵 体积流率 流量法 小孔法 

分 类 号：TB752[一般工业技术—真空技术]