A mechanically coupled MEMS filter with high-Q width extensional mode resonators  

作　　者：Wei Wang Wenli Liu Junyuan Zhao Bo Niu Zeyu Wu Yinfang Zhu Jinling Yang Fuhua Yang 

机构地区：[1]Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China [2]Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China

出　　处：《Journal of Semiconductors》2024年第8期41-48,共8页半导体学报（英文版）

基　　金：supported by the National Natural Science Foundation of China(61734007);National Key Research and Development Program of China(2022YFF0706100).

摘　　要：This work presents a novel radio frequency(RF)narrowband Si micro-electro-mechanical systems(MEMS)filter based on capacitively transduced slotted width extensional mode(WEM)resonators.The flexibility of the plate leads to multiple modes near the target frequency.The high Q-factor resonators of around 100000 enable narrow bandwidth filters with small size and simplified design.The 1-wavelength and 2-wavelength WEMs were first developed as a pair of coupled modes to form a passband.To reduce bandwidth,two plates are coupled with aλ-length coupling beam.The 79.69 MHz coupled plate filter(CPF)achieved a narrow bandwidth of 8.8 kHz,corresponding to a tiny 0.011%.The CPF exhibits an impressive 34.84 dB stopband rejection and 7.82 dB insertion loss with near-zero passband ripple.In summary,the RF MEMS filter presented in this work shows promising potential for application in RF transceiver front-ends.

关 键 词：MEMS narrowband filter mechanically coupling quality factor width extensional mode 

分 类 号：TN713[电子电信—电路与系统]