基于磁控溅射改善陶瓷涂层断裂韧性的研究进展  

Research Progress on Improving Fracture Toughness of Ceramic Coating Based on Magnetron Sputtering

作　　者：高正源[1] 李昱志 翟帅 汪松林 孙鹏飞 GAO Zhengyuan;LI Yuzhi;ZHAI Shuai;WANG Songlin;SUN Pengfei(School of Mechatronics&Vehicle Engineering,Chongqing Jiaotong University,Chongqing 400074,China;Shanghai Institute of Applied Physics,Chinese Academy of Sciences,Shanghai 201800,China)

机构地区：[1]重庆交通大学机电与车辆工程学院,重庆400074 [2]中国科学院上海应用物理研究所,上海201800

出　　处：《涂料工业》2024年第8期76-81,共6页Paint & Coatings Industry

基　　金：国家自然科学基金项目(22272013)。

摘　　要：陶瓷涂层因其优异的耐磨、隔热等性能,被应用于各工程领域,但其断裂韧性差、质脆的特点严重限制了其推广应用。为了改善陶瓷涂层质脆的缺陷,研究人员采用了多种方法对其进行增韧改性,文中论述了陶瓷涂层的增韧方法以及对应机制,综述了磁控溅射原理以及调控其工艺参数、掺杂其他元素等方法对陶瓷涂层结构、应力、晶界等的影响。总结了目前陶瓷涂层断裂韧性与硬度不可兼得、增韧机制受涂层尺寸影响等研究难点,并从磁控溅射工艺参数、多种工艺和增韧机制协同增韧等方面对提高陶瓷涂层断裂韧性进行了展望。Ceramic coating have been used in various engineering fields because of their excellent wear resistance and heat insulation properties,but their poor fracture toughness and brittle quality seriously limit their popularization.In order to improve the brittleness of ceramic coating,the toughening method and corresponding mechanism of ceramic coating were discussed.The principle of magnetron sputtering and the influence of regulating the process parameters and doping other elements on the structure,stress and grain boundary of ceramic coating were reviewed.The difficulties in the study of ceramic coating fracture toughness and hardness are summarized,and the toughening mechanism is affected by the size of the coating.The prospects for improving the fracture toughness of ceramic coating are presented from the aspects of the process parameters of magnetron sputtering and the synergies of various processes and toughening mechanisms.

关 键 词：陶瓷涂层 磁控溅射 断裂韧性 增韧机制 

分 类 号：TQ637[化学工程—精细化工]