微机电系统半导体气体传感器检测方法  

Test Method of Semiconductor Gas Sensor Based on MEMS

作　　者：耿彦红 史苏娟 王瑞 董亮华 GENG Yanhong;SHI Sujuan;WANG Rui;DONG Lianghua

机构地区：[1]苏州市计量测试院

出　　处：《计量与测试技术》2024年第7期16-18,共3页Metrology & Measurement Technique

基　　金：江苏省市场监督管理局科技计划项目(项目名称:微机电系统半导体气体传感器性能检测研究,项目编号:KJ2022081)。

摘　　要：为解决微机电系统半导体气体传感器检测自主性大,一致性欠缺等问题,对传感器进行全面评价,促进性能进行,本文针对其检测方法进行了研究,检测项目包括传感器检测误差、漂移、温湿度影响试验、振动跌落试验、长期稳定性试验等通用项目,以及功率、传感器检测下限、响应时间和恢复时间等传感器特有性能参数。In order to solve the problems such as large detection autonomy and lack of consisteney of smiconductorgas sensors in MEMS,the sensor is comprehensively evaluated and its performanee is promoted.The detection meth-ods are studied in this paper.The detection items include sensor detection error,drift,temperature and humidity in-fluence test,vibration drop test,long-term stability test and other general items.And the special performance pa-rameters of the sensor such as power,sensor detection limit,response time and recovery time.

关 键 词：微机电系统 半导体 气体传感器 检测方法 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]