基于改进的多元宇宙算法的晶圆生产调度算法  

Wafer Production Scheduling Algorithm Based on Improve Multiverse Algorithm

作　　者：王银玲 师春雪 田辉[1,2] 朱晓然 曹仰杰[1] 卫荣汉 WANG Yinling;SHI Chunxue;TIAN Hui;ZHU Xiaoran;CAO Yangjie;WEI Ronghan(School of Cyber Science and Engineering,Zhengzhou University,Zhengzhou 450002,China;Institute of Intelligent Sensing,Zhengzhou University,Zhengzhou 450002,China;Hanwei Electronics Group Corporation,Zhengzhou 450001,China;School of Mechanics and Safety Engineering,Zhengzhou University,Zhengzhou 450001,China)

机构地区：[1]郑州大学网络空间安全学院,河南郑州450002 [2]郑州大学智能传感研究院,河南郑州450002 [3]汉威科技集团股份有限公司,河南郑州450001 [4]郑州大学力学与安全工程学院,河南郑州450001

出　　处：《郑州大学学报（理学版）》2024年第6期77-83,共7页Journal of Zhengzhou University:Natural Science Edition

基　　金：国家重点研发计划课题(2021YFB3200403);中国博士后科学基金项目(2021M692926);河南省科技攻关项目(222102310647);郑州市协同创新重大专项(20XTZX06013)。

摘　　要：针对以最小化最大完工时间为目标的晶圆生产制造系统的调度问题,提出了改进的多元宇宙算法。根据晶圆生产制造系统的特征,构建了一个整数规划模型。针对原始多元宇宙算法的局限性,分别从使用启发式规则生成初始种群、重新定义向最优宇宙移动策略和宇宙更新策略三个方面对算法进行改进。将原始多元宇宙算法、遗传算法、NEH启发式算法、迭代贪婪算法以及通过不同策略改进的多元宇宙算法进行对比实验,结果表明,所提方法可以高效地解决晶圆制造过程中的复杂现象。An improved multiverse algorithm was proposed to solve the scheduling problem of wafer manufacturing systems with the aim of minimizing the maximum completion time.An integer programming model was constructed according to the characteristics of the wafer manufacturing system.In view of the limitations of the original multiverse algorithm,the algorithm was improved from three aspects:the use of heuristic rules to generate the initial population,the redefinition of the strategy of moving to the optimal universe and the strategy of updating the universe.Comparative experiments were conducted on the original multiverse algorithm,genetic algorithm,NEH heuristic algorithm,greedy iteration algorithm,and multiverse algorithms improved by different strategies.The results showed that the proposed algorithm could effectively deal with the complex characteristics of wafer manufacturing systems.

关 键 词：晶圆制造 多元宇宙算法 可重入的混合流水车间 调度算法 

分 类 号：TP18[自动化与计算机技术—控制理论与控制工程]