基于硅基MEMS技术的三维集成宽带延时器  

3D integrated broadband microwave delay line based on the MEMS technology

作　　者：黄永超 安维乐 赵宇[1] 厉志强 HUANG Yongchao;AN Weile;ZHAO Yu;LI Zhiqiang(th Research Institute of China Electronics Technology Group Corporation,Shijiazhuang 050051,China)

机构地区：[1]中国电子科技集团公司第十三研究所,河北石家庄050051

出　　处：《中国高新科技》2024年第11期89-91,共3页

摘　　要：为满足宽带相控阵天线小型化需求,本文采用微电子机械系统(MEMS)三维异构集成技术,设计了一种宽带四位延时三维集成器。延时器工作频率覆盖8GHz~15GHz,器件内部集成了GaAs芯片、COMS芯片和固定延时器等电路,具有射频信号延时控制、增益补偿和电源同步调制等功能。器件尺寸为20mm×20mm×1.3mm,重量1.35g,背面为接地面,采用微组装粘接方式安装,输入输出端口通过键合线方式连接传输。测试结果表明,硅基延时器工作频段内延时波动量≤3ps,插入损耗≤22dB,端口驻波≤1.5,各延时位态幅度一致性≤±1dB。To meet the miniaturization requirements of broadband phased array antennas,a broadband 4-bit microwave delay line 3D heterogeneous integrator was designed using microelectromechanical systems(MEMS) 3D integration technology.The working frequency of the delay device covers 8GHz to 15GHz,and the device integrates GaAs chips,COMS chips,and fixed microwave delay line.The device has the functions of RF signal delay control,gain compensation and power supply synchronous modulation.The device size is 20mm × 20mm × 1.3mm,with a weight of 1.35g.The back of the device is the ground.The device is installed by the microassembly process.The input/output port connects to the transmission by bonding line mode.The test results show that the delay fluctuation is ≤ 3ps,insertion loss is ≤ 22dB,port VSWR ≤ 1.5,and the amplitude consistency of each delay bit state is ≤ ± 1dB.

关 键 词：延时器 微电子机械系统(MEMS) 三维异构集成 

分 类 号：TN952[电子电信—信号与信息处理]