化学气相沉积陶瓷薄膜高温摩擦磨损性能研究  

High Temperature Friction and Wear Behaviours of Ceramic Films by CVD

作　　者：王旋 殷宇 张立业 代野 周富 彭冬 白懿心 丁星星 董玲抒 花泽荟 戴明辉 丛大龙 WANG Xuan;YIN Yu;ZHANG Liye;DAI Ye;ZHOU Fu;PENG Dong;BAI Yixin;DING Xingxing;DONG Lingshu;HUA Zehui;DAI Minghui;CONG Dalong(Southwest Institute of Technology and Engineering of China South Industries Group Corporation,Chongqing 401329,China;Bohai Shipyard Group Co.,Ltd.,Liaoning Huludao 125004,China)

机构地区：[1]中国兵器装备集团西南技术工程研究所,重庆401329 [2]渤海造船厂集团有限公司,辽宁葫芦岛125004

出　　处：《表面技术》2024年第15期68-76,共9页Surface Technology

摘　　要：目的对比研究不同陶瓷薄膜的耐高温磨损性能。方法采用化学气相沉积工艺制备了TiN/TiCN、TiN/Al_(2)O_(3)、TiN/TiCN/Al_(2)O_(3)3种陶瓷薄膜。通过划痕测试、显微硬度测试、高温摩擦磨损试验等测试方法,分别表征并评价3种陶瓷薄膜的附着力、硬度、耐600℃高温磨损性能,并通过扫描电子显微镜和光学显微镜对磨痕形貌进行分析。结果化学气相沉积制备的3种陶瓷薄膜结构致密,无孔隙、裂纹等缺陷,且与基材结合界面良好,其中,TiN/TiCN/Al_(2)O_(3)多层薄膜与基体结合力最佳,为68.53 N,但其表层Al_(2)O_(3)薄膜与中间层TiCN薄膜结合强度较弱。600℃高温摩擦磨损结果表明,TiN/Al_(2)O_(3)薄膜具有最高的高温摩擦因数,平均为0.51,但其耐高温磨损性能最佳,体积磨损率为0.58×10^(‒5)mm^(3)/(N·m);而TiN/TiCN薄膜具有最低的高温摩擦因数,平均为0.37,但其耐高温磨损性能最差,体积磨损率为4.23×10^(‒5) mm^(3)/(N·m)。结论3种陶瓷薄膜高温摩擦磨损的主要损伤形式各异,TiN/TiCN薄膜的主要磨损机制为黏着磨损、氧化磨损和疲劳磨损,TiN/Al_(2)O_(3)薄膜的主要磨损机制为磨粒磨损,TiN/TiCN/Al_(2)O_(3)多层薄膜的主要磨损机制为磨粒磨损和氧化磨损。TiN/Al_(2)O_(3)薄膜的耐高温磨损性能最佳是由于其硬度较高,且化学性质稳定,主要磨损形式为磨粒磨损,较难被磨损去除。而TiN/TiCN薄膜耐高温磨损性能最差是由于TiCN薄膜硬度较低,在高温摩擦作用下,会发生氧化磨损、黏着磨损、疲劳磨损等多种损伤形式。The TiN/TiCN,TiN/Al_(2)O_(3) and TiN/TiCN/Al_(2)O_(3) ceramic films were prepared by chemical vapor deposition on mechanically polished H13 alloy steel to study the high temperature wear resistance.The adhesion,hardness and high temperature wear resistance at 600℃of the three films were characterized and evaluated by means of scratch test,microhardness test and high temperature friction and wear test,and the wear morphology was analyzed by scanning electron microscope and optical microscope.The results showed that the outermost layer of the TiN/TiCN film showed an inverted pyramid shape,and the film thickness was about 8.8μm.The outermost layer of the TiN/Al_(2)O_(3) film had a loose structure and small pores were observed.The inverted pyramid grain was embedded into the film,and the film thickness was about 3.0μm.The surface of TiN/TiCN/Al_(2)O_(3) film presented particle cluster structure,and the thickness was about 10.8μm.The three ceramic films prepared by CVD had dense structure,no pores,cracks and other defects,and had good bonding interface with the substrate.The TiN/TiCN/Al_(2)O_(3) multilayer film had the best bonding strength with the substrate,which was 68.53 N and might be due to the good hardness gradient formed between TiN,TiCN and Al_(2)O_(3).However,the bonding strength between the surface Al_(2)O_(3) film and the middle layer TiCN film was weak.The results of high temperature friction and wear at 600℃showed that TiN/Al_(2)O_(3) film had the highest high temperature friction coefficient,with an average value of 0.51,but its high temperature wear resistance was the best and the volume wear rate was 0.58×10^(‒5) mm^(3)/(N·m).The TiN/TiCN film had the lowest high temperature friction coefficient,with an average value of 0.37,but its high temperature wear resistance was the worst and the volume wear rate was 4.23×10^(‒5) mm^(3)/(N·m).The main damage forms of the three ceramic films at high temperature were different.The main wear mechanisms of the TiN/TiCN films were adhesive wear,oxida

关 键 词：化学气相沉积 陶瓷薄膜 高温摩擦磨损 结合力 耐磨性 磨损机制 

分 类 号：TH117[机械工程—机械设计及理论]