类金刚石碳膜导电材料设计与制备工艺技术研究  

Research on design and preparation technology of DLC film conductive material

作　　者：李涛 胡宇涵 徐冬 尹思淇 杨思远 LI Tao;HU Yuhan;XU Dong;YIN Siqi;YANG Siyuan(The 49th Research Institute of China Electronics Technology Group Corporation,Harbin 150028,China)

机构地区：[1]中国电子科技集团公司第四十九研究所,黑龙江哈尔滨150028

出　　处：《传感器与微系统》2024年第8期60-63,共4页Transducer and Microsystem Technologies

摘　　要：当传感器工作时,电刷与电阻体始终处于滑动接触和摩擦的状态,长期工作会导致涂覆的电阻薄膜磨损严重,直接影响传感器的使用寿命。为了提高传感器的可靠性,增强传感器电阻敏感元件的耐磨性,本文提出了一种类金刚石碳(DLC)膜导电材料设计与制备工艺技术。在氧化铝基片陶瓷上,采用双靶共溅射的工艺,通过精确地控制溅射条件,获得均匀且致密的类金刚石膜,在满足高精度与小型化要求的同时,增强异质材料长期工作的稳定性。When the sensor is working,the brush and the resistor are always in the state of sliding contact and friction.Long-term work will cause the coated resistance thin film to wear seriously,which will directly affect the service life of the sensor.In order to improve the reliability of the sensor and enhance the wear resistance of the resistive sensing element of the sensor,a design and preparation process technology of diamond-like carbon(DLC)film conductive material is proposed.The dual-target co-sputtering process is used on Al2 O3 substrate ceramic,and the uniform and dense diamond-like film is obtained by accurately controlling the sputtering conditions,which meets the requirements of high precision and miniaturization,and enhances the stability of the heterogeneous materials for long-term work at the same time.

关 键 词：传感器 工艺 双靶共溅射 类金刚石碳膜 氧化铝陶瓷 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]