金属微纳结构的飞秒激光投影光刻(特邀)  

Metal Micro⁃Nano Structures by Femtosecond Laser Projection Lithography(Invited)

作　　者：王鹤鸣 辛晨 张莉 薛宇航 吴东 胡衍雷 Wang Heming;Xin Chen;Zhang Li;Xue Yuhang;Wu Dong;Hu Yanlei(School of Engineering Science,University of Science and Technology of China,Hefei 230026,Anhui,China;Department of Mechanical and Automation Engineering,The Chinese University of Hong Kong,Hong Kong 999077,China;Anhui Qingyu Photoelectric Technology Co.,Ltd.,Hefei 230088,Anhui,China)

机构地区：[1]中国科学技术大学工程科学学院,安徽合肥230026 [2]香港中文大学机械与自动化工程学系,中国香港999077 [3]安徽庆宇光电科技有限公司,安徽合肥230088

出　　处：《中国激光》2024年第12期389-397,共9页Chinese Journal of Lasers

基　　金：国家自然科学基金(52122511,52375582);安徽省科技重大专项(202203a05020014)。

摘　　要：金属薄膜的精密图案化是构建多种电子微纳器件的关键,然而,直接高效地制造大面积微纳金属图案结构仍极具挑战性。利用数字微镜器件将飞秒激光的光束调制成任意的二维图案化光束,使用面型光场将金属溶液中的离子直接还原成纳米颗粒并且沉积成对应的金属图案,成功实现了金,银两种贵金属的高效、大面积光刻沉积,且加工的结构具有优秀的表面质量和光学性质。这种加工方法速度快,条件温和,使用范围广,并且成本较低,为金属微纳结构的图案化制造提供了一种新的思路。Objective Nanopatterned metal thin films are key functional elements of various nano-enabled devices for a variety of applications.However,the efficient fabrication of large-area micro-nano metal structures remains extremely challenging.In this study,a digital micromirror device is used to modulate the beam of a femtosecond laser into an arbitrary two-dimensional patterned beam,and the ions in the metal solution are reduced to nanoparticles and deposited onto the corresponding metal pattern using the projection of a patterned femtosecond laser.We succeed in the high-speed large-area deposition of gold and silver precious metals,where the processed structures exhibit excellent surface quality and optical properties.This processing method is fast,mild,widely used,and inexpensive,and provides a new means of conducting metal micro-nano patterned manufacturing.Methods A silver ion precursor solution is prepared by adding a suitable amount of aqueous ammonia to an aqueous mixture of silver nitrate(0.1 mol/L)and trisodium citrate(0.05 mol/L)under stirring until a clear solution is formed.The gold-ion precursor solution is prepared by an aqueous mixture of ionic liquid(2.1 mol/L)and tetrachloroauric acid(0.3 mol/L)under stirring until a clear solution is formed.The ionic liquid is prepared slightly differently from that previously reported.Specifically,an excess of glycine(73.2 mmol)is added to an aqueous solution of choline hydroxide(mass fraction of 46%,61 mmol),and the mixture is stirred at room temperature for 24 h.Water is then removed under vacuum at 50ºC.Acetonitrile(60 mL)and methanol(20 mL)are then added to precipitate the unreacted amino acids.The mixture is stirred vigorously overnight and filtered through a Celite filter.The solvents are evaporated under reduced pressure and,if necessary,the residue is redissolved in acetonitrile/methanol.Finally,the purified ionic liquid is dried under vacuum overnight at 60ºC and stored under moisture-free conditions until use.Results and Discussions Images are projected

关 键 词：飞秒激光 投影光刻 增材制造 光化学沉积 微纳金属打印 

分 类 号：TN249[电子电信—物理电子学]