基于LTCC的3D异质集成低通滤波器  

3D Heterogeneous Integrated Low-pass Filter Based on LTCC

作　　者：曾竞涛 沈斌 徐金旭 沓世我 章秀银[1] ZENG Jingtao;SHEN Bin;XU Jinxu;TA Shiwo;ZHANG Xiuyin(School of Electronic and Information Engineering,South China University of Technology,Guangzhou 510641,China;Guangzhou Fenghua Advanced Technology Holding Co.,Ltd.,Zhaoqing 526060,China;State Key Laboratory of Key Materials and Processes for New Electronic Components,Zhaoqing 526060,China)

机构地区：[1]华南理工大学电子与信息学院,广州510641 [2]广东风华高新科技股份有限公司,肇庆526060 [3]新型电子元器件关键材料与工艺国家重点实验室,肇庆526060

出　　处：《微波学报》2024年第4期69-73,共5页Journal of Microwaves

基　　金：国家自然科学基金(62031016,62001172);广州市重点研发计划(202103020002);中国博士后科学基金(2022M710818)。

摘　　要：在射频应用中,低温共烧陶瓷(LTCC)技术是关键技术路线之一,然而使用单一介质的LTCC技术的性能很局限。为此,文中对基于LTCC的3D异质集成技术进行研究,通过调节流延配方、烧结速度、烧结温度、保温时间等工艺参数,设计异质匹配共烧的烧结行为控制、界面相容性和组织性能调控方案,开发出稳定可靠的LTCC集成工艺,给出基于LTCC异质集成的器件仿真设计、3D集成制备方法,并制作了一款共烧界面结合完好、性能优越的LTCC异质集成低通滤波器进行验证。验证结果表明,该异质集成技术的瓷粉性能指标和可加工特性满足使用要求,预期能够得到广泛应用。Low temperature co-fired ceramic(LTCC)technology is one of the key technologies in the application of radio frequency application,but LTCC technology with a single dielectric material faces performance limitations.Therefore,in this paper a research on 3D heterointegration technology based on LTCC is conducted.By adjusting technical schemes such as casting formula,heating speed,sintering temperature and holding time,a sintering behavior control,interface compatibility,and tissue performance control scheme for heteromatching co-firing is proposed.A stable and reliable LTCC integration process is developed,and the simulation design and 3D integration preparation methods for devices based on LTCC heterointegration are proposed.A LTCC heterostructure integrated low-pass filter with excellent co-firing interface and performance is fabricated for verification.The verification results show that the performance indicators and processability of the heterogeneous integration technology can meet the requirements for use,and it is expected to be widely applied.

关 键 词：低温共烧陶瓷 3D异质集成 低通滤波器 

分 类 号：TN713.4[电子电信—电路与系统]