Thermal noise-driven resonant sensors  

作　　者：Yan Qiao Alaaeldin Elhady Mohamed Arabi Eihab Abdel-Rahman Wenming Zhang 

机构地区：[1]School of Mechanical Engineering,Shanghai Jiao Tong University,Shanghai,China [2]Department of Systems Design Engineering,University of Waterloo,Waterloo,ON,Canada

出　　处：《Microsystems & Nanoengineering》2024年第3期259-271,共13页微系统与纳米工程（英文）

基　　金：support of the National Natural Science Foundation of China(12032015,12202263);the Science and Technology Innovation Plan of Shanghai(21190760100);the Innovation Program of Shanghai Municipal Education Commission(2019-01-07-00-02-E00030);the China Postdoctoral Science Foundation(2021TQ0201,2022M712069).

摘　　要：MEMS/NEMS resonant sensors hold promise for minute mass and force sensing.However,one major challenge is that conventional externally driven sensors inevitably encounter undesired intrinsic noise,which imposes a fundamental limitation upon their signal-to-noise ratio(SNR)and,consequently,the resolution.Particularly,this restriction becomes increasingly pronounced as sensors shrink to the nanoscale.In this work,we propose a counterintuitive paradigm shift that turns intrinsic thermal noise from an impediment to a constituent of the sensor by harvesting it as the driving force,obviating the need for external actuation and realizing‘noise-driven’sensors.Those sensors employ the dynamically amplified response to thermal noise at resonances for stimulus detection.We demonstrate that lightly damped and highly compliant nano-structures with high aspect ratios are promising candidates for this class of sensors.To overcome the phase incoherence of the drive force,three noise-enabled quantitative sensing mechanisms are developed.We validated our sensor paradigm by experimental demonstrating noise-driven pressure and temperature sensors.Noise-driven sensors offer a new opportunity for delivering practical NEMS sensors that can function at room temperature and under ambient pressure,and a development that suggests a path to cheaper,simpler,and low-power-consumption sensors.

关 键 词：noise RESONANT OVERCOME 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]