射频集成微系统技术的发展与典型应用  

Development and Typical Applications of the Radio Frequency Integrated Microsystem Technology

作　　者：杨进 张君直[2] 朱健[2] 韩磊[1] 孙斌 YANG Jin;ZHANG Junzhi;ZHU Jian;HAN Lei;SUN Bin(Key Laboratory of MEMS of the Ministry of Education,School of Integrated Circuits,Southeast University,Nanjing 210096,Jiangsu,China;Nanjing Electronic Devices Institute,Nanjing 210016,Jiangsu,China;Shanghai Aerospace Electronic Communication Equipment Research Institute,Shanghai 201109,China)

机构地区：[1]东南大学集成电路学院MEMS教育部重点实验室,江苏南京210096 [2]南京电子器件研究所,江苏南京210016 [3]上海航天电子通讯设备研究所,上海201109

出　　处：《上海航天（中英文）》2024年第4期102-112,共11页Aerospace Shanghai（Chinese&English）

基　　金：国家级预研项目(JZX7Y202306810000041)。

摘　　要：摩尔定律已经逐渐放缓,并越来越逼近其物理极限,但未来的射频系统仍然朝着更高集成度、更高性能、更高工作频率等方向发展,射频集成微系统技术是实现射频系统微型化的核心技术之一。本文首先对射频微系统的发展和现状进行了介绍,重点分析了美国国防高级研究计划局(DARPA)的微系统发展历程和经典项目,接着对射频微系统的技术路线和解决方案进行了梳理和总结,随后通过一系列典型应用案例,展现了最新的射频集成微系统技术,最后提出了射频集成微系统技术的进一步发展思路。Moore's law has gradually slowed down,and is approaching its physical limit.However,future radio frequency(RF)systems are still developing towards higher integration,higher performance,higher operating frequency,etc.The RF integrated microsystem technology is one of the core technologies to realize the miniaturization of RF systems.In this paper,the development and typical applications of the RF integrated microsystem technology are introduced.First,the development and current situation of RF microsystems are introduced,focusing on the analysis of the microsystem development process and classic projects of the Defense Advanced Research Projects Agency(DARPA).Second,the technical route and solutions of RF microsystems are summarized.Third,the latest RF integrated microsystem technology is revealed through a series of typical application cases.Finally,the further development ideas for the RF integrated microsystem technology are put forward.

关 键 词：摩尔定律 射频(RF) 集成 微系统 解决方案 

分 类 号：TN454[电子电信—微电子学与固体电子学]