具有片上电感的改进型梯形声表面波滤波器  

Improved Trapezoidal SAW Filter with On-Chip Inductance

作　　者：杨茂坤 帅垚[2,3] 魏子杰[2,3] 吴传贵[2,3] 罗文博[2,3] 张万里[2,3] YANG Maokun;SHUAI Yao;WEI Zijie;WU Chuangui;LUO Wenbo;ZHANG Wanli(College of Optoelectronic Engineering,Chongging University of Posts and Telecommunications,Chongqing 400065,China;Chongqing Institute of Microelectronics Industry Technology,University of Electronic Science and Technology of China,Chongqing 401332,China;School of Electronic Science and Engineering,University of Electronic Science and Technology of China,Chengdu 611731,China)

机构地区：[1]重庆邮电大学光电工程学院,重庆400065 [2]电子科技大学重庆微电子产业技术研究院,重庆401332 [3]电子科技大学电子科学与工程学院,四川成都611731

出　　处：《压电与声光》2024年第4期439-442,共4页Piezoelectrics & Acoustooptics

基　　金：四川省科技计划基金资助项目(2020YFJ0002)。

摘　　要：针对小体积声表面波(SAW)滤波器性能受封装影响较大的问题,提出了一种新型SAW梯形滤波器电路拓扑结构。通过分析滤波器高频受封装影响造成的远端抑制上翘的现象,从电路结构出发,改变版图设计,实现了片上电感。采用传统梯形滤波器结构和利用纵向耦合双模谐振器型滤波器(DMS)特殊接地结构相结合的电路拓扑结构,有助于提高带外抑制和设计灵活性。在标准的42°Y-X钽酸锂(LiTaO_(3))基板上制作滤波器,通过仿真分析得到中心频率2580 MHz、带宽50 MHz、插入损耗小于2.5 dB的高阶梯形射频SAW滤波器的最优拓扑结构。测试结果表明,通过改变电路拓扑结构关键参数和引入新的传输零点,可改善在高频段内的带外抑制特性。The performance of small-volume surface acoustic wave(SAW) filters is significantly affected by packaging.To solve this problem,a new SAW trapezoidal filter circuit topology is proposed.By analyzing the phenomenon of the upturn of the remote rejection caused by the packaging of the filter at high frequency,the layout design is changed from the circuit structure to realize the on-chip inductance.The circuit topology that combines the conventional trapezoidal filter structure with the special grounding structure of the longitudinally coupled dual-mode resonator type filter(DMS) contributes to out-of-band rejection and design flexibility.The optimal topology of the high-order RF SAW filter with a center frequency of 2 580 MHz,bandwidth of 50 MHz,and an insertion loss of less than 2.5 dB is obtained via simulation analysis on a standard 42°Y-X lithium tantalate(LiTaO_3) substrate.

关 键 词：封装 声表面波(SAW)滤波器 片上电感 DMS结构 传输零点 带外抑制 

分 类 号：TN384[电子电信—物理电子学] TN309.54